Atomic-force-microscopy visualization of Si nanocrystals in SiO 2 thermal oxide using selective etching

Semiconductors

Volumn 38, Issue 11, 2004, Pages 1254-1259

  Dunaevskii M S ^a   Grob, J J ^b   Zabrodskii A G ^a   Laiho, R ^c   Titkov, A N ^a  

^a IOFFE INSTITUTE   (Russian Federation)

^b UNIVERSITÉ DE STRASBOURG   (France)

^c Turku University   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 10044248919     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1823054     Document Type: Article

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