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Volumn 262, Issue 1-4, 2004, Pages 89-94
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Defect-selective etching of bulk AlN single crystals in molten KOH/NaOH eutectic alloy
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Author keywords
A1. Defect; A1. Etching; A1. X ray topography; A2. Growth from vapor; B1. Nitrides
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
BUBBLE FORMATION;
CRYSTAL DEFECTS;
CRYSTAL LATTICES;
DENSITY (OPTICAL);
DISLOCATIONS (CRYSTALS);
EPITAXIAL GROWTH;
ETCHING;
EUTECTICS;
POTASSIUM COMPOUNDS;
SCANNING ELECTRON MICROSCOPY;
SODIUM COMPOUNDS;
SUBSTRATES;
THERMAL EXPANSION;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
GROWTH FROM VAPOR;
X-RAY TOPOGRAPHY;
SINGLE CRYSTALS;
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EID: 0842308463
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jcrysgro.2003.10.051 Document Type: Article |
Times cited : (71)
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References (12)
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