An optical gas sensor based on ellipsometric readout

IEEE Sensors Journal

Volumn 3, Issue 6, 2003, Pages 739-743

  Wang, Guoliang ^a   Arwin, Hans ^a   Jansson, Roger ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

Alcohol detection; Off null ellipsometry; Optical gas sensor; Porous silicon layers

Indexed keywords

CHEMICAL SENSORS; ELLIPSOMETRY; ETHANOL; LIGHT REFLECTION; METHANOL; OPTIMIZATION; OPTOELECTRONIC DEVICES; PHOTOLUMINESCENCE; POROUS SILICON;

ALCOHOL DETECTION; OFF-NULL ELLIPSOMETRY; OPTICAL GAS SENSORS; POROUS SILICON LAYERS;

OPTICAL SENSORS;

EID: 0742286162     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2003.820350     Document Type: Conference Paper

References (21)

1. A. Brecht and G. Gauglitz, "Optical probe and transducers," Biosens. Bioelectron., vol. 10, pp. 923-936, 1995.
2. _, "Recent development in optical transducers for chemical or biochemical applications," Sens. Actuators B, vol. 38, pp. 1-7, 1997.
3. Y. Kostov and G. Rao, "Low cost optical instrumentation for biomedical measurements," Rev. Sci. Instrum., vol. 71, pp. 4361-4685, 2000.
4. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light. New York: North-Holland, 1977.
5. R. M. Ostroff, D. Maul, G. R. Bogart, S. Yang, J. Christian, D. Hopkins, D. Clark, B. Trotte, and G. Moddel, "Fixed polarizer ellipsometry for simple and sensitive detection of thin-films generated by specific molecular interactions: Applications in immunoassays and DNA sequence detection," Clin. Chem., vol. 44, pp. 2031-2035, 1998.
6. R. M. Ostroff, D. Hopkins, A. B. Haeberli, W. Baouchi, and B. Polisky, "Thin-film biosensor for rapid visual detection of nucleic acid targets," Clin. Chem., vol. 45, pp. 1659-1664, 1999.
7. O. Jin, P. Tengvall, I. Lundström, and H. Arwin, "A biosensor concept based on imaging ellipsometry for visualization of biomolecular interactions," Anal. Biochem., vol. 232, pp. 69-72, 1995.
8. Biophoton. Int., pp. 36-37, July 1999.
9. S. Zangooie, R. Bjorklund, and H. Arwin, "Vapor sensitivity of thin porous silicon layers," Sens. Actuators B, vol. 43, pp. 168-174, 1997.
10. S. Guo, R. Rochotzki, I. Lundström, and H. Arwin, "Ellipsometric sensitivity to halothane vapors of hexamethyldisiloxane plasma polymer films," Sens. Actuators B, vol. 44, pp. 243-247, 1997.
11. R. Bjorklund, J. Hedlund, J. Sterte, and H. Arwin, "Vapor adsorption in thin silicalite-1 films studied by spectroscopic ellipsometry," J. Phys. Chem. B, vol. 102, pp. 2245-2250, 1998.
12. H. Arwin, "Is ellipsometry suitable for sensor applications?," Sens. Actuators A, vol. 92, pp. 43-51, 2001.
13. "Proceedings of "Porous semiconductor science and technology"," Phys. Stat. Sol. (a), vol. 182, pp. 7-598, 2000.
14. J. H. Song and M. J. Sailor, "Quenching of photoluminescence from porous silicon by aromatic molecules," J. Amer. Chem. Soc., vol. 119, pp. 7381-7385, 1997.
15. J. Gao, T. Gao, and M. J. Sailor, "Porous-silicon vapor sensor based on laser interferometry," Appl. Phys. Lett., vol. 77, pp. 901-903, 2000.
16. H. Arwin, S. Welin-Klintström, and R. Jansson, "Off-null ellipsometry revisited: Basic considerations for measuring surface concentrations at solid/liquid interfaces," J. Colloid Interface Sci., vol. 156, pp. 377-382, 1993.
17. G. Wang, H. Arwin, and R. Jansson, "Optimization of azimuth angle settings in PCSA off-null ellipsometry," Appl. Opt., vol. 42, pp. 38-44, 2003.
18. S. Zangooie, R. Bjorklund, and H. Arwin, "Water interaction with thermally oxidized porous silicon layers," J. Electrochem. Soc., vol. 144, pp. 4027-4035, 1997.
19. S. Zangooie, R. Jansson, and H. Arwin, "Reversible and irreversible control of optical properties of porous silicon superlattices by thermal oxidation, vapor adsorption, and liquid penetration," J. Vac. Sci. Technol. A, vol. 16, pp. 2901-2912, 1998.
20. J. W. P. Bakker, H. Arwin, G. Wang, and K. Järrendahl, "Improvement of polymer based gas sensors by polymer modification," Phys. Stat Sol. (a), vol. 197, pp. 378-381, 2003.
21. G. Wang and H. Arwin, "Modification of vapor sensitivity in ellipsometric gas sensing by copper deposition in porous silicon," Sens. Actuators B, vol. 85, pp. 95-105, 2002.