Optimization of azimuth angle settings in polarizer-compensator-sample-analyzer off-null ellipsometry

Applied Optics

Volumn 42, Issue 1, 2003, Pages 38-44

  Wang, Guoliang ^a   Arwin, Hans ^a   Jansson, Roger ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CHEMICAL SENSORS; LIGHT POLARIZATION; OPTICAL PROPERTIES; OPTIMIZATION;

LIGHT INTENSITY;

ELLIPSOMETRY;

EID: 0037255585     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.000038     Document Type: Article

References (8)

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3. D. L. Confer, R. M. A. Azzam, and N. M. Bashara, “Ellipsometer nulling: convergence and speed,” Appl. Opt. 15, 2568-2575 (1976).
4. P. A. Cuypers, W. T. Hermens, and H. C. Hemker, “Ellipsometry as a tool to study protein films at liquid-solid interfaces,” Anal. Biochem. 84, 56-57 (1978).
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6. H. Arwin, “Is ellipsometry suitable for sensor applications?” Sens. Actuators A 92, 43-51 (2001).
7. S. Guo, R. Rochotzki, I. Lundstrom, and H. Arwin, “Ellipsomet-ric sensitivity to halothane vapors of hexamethydisiloxane plasma polymer layers,” Sens. Actuators B 44, 243-247 (1997).
8. S. Zangooie, “Fabrication, characterization and application of porous silicon thin films and multilayered systems,” Ph. D. dissertation 581 (Linkoping University, Linkoping, Sweden, 1999).