Improvement of porous silicon based gas sensors by polymer modification

Physica Status Solidi (A) Applied Research

Volumn 197, Issue 2, 2003, Pages 378-381

  Bakker, J W P ^a   Arwin, H ^a   Wang, G ^a   Jarrendahl K ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MODIFICATION; DEPOSITION; ELLIPSOMETRY; ORGANIC SOLVENTS; POROSITY; POROUS SILICON; SENSITIVITY ANALYSIS; SILICON SENSORS; VAPORS;

INTERFERENCE SPECTROSCOPY; POLYMER CONCENTRATION; SPECTROSCOPIC ELLIPSOMETRY;

CHEMICAL SENSORS;

EID: 0038609658     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200306529     Document Type: Conference Paper

References (6)

1. S. Zangooie, R. Bjorklund, and H. Arwin, J. Electrochem. Soc. 144, 4027 (1997).
2. S. E Létant and M. J. Sailor, Adv. Mater. 13, 335 (2001).
3. Jan Gao, Ting Gao, Yang Yang Li, and Michael J. Sailor, Langmuir; 2002; ASAP Article.
4. M. Andersson, P. O. Ekeblad, T. Hjertberg, O. Wennerström, and O. Inganäs, Polym. Commun. 32, 546 (1991).
5. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland 1987).
6. S. Guo, R. Rochotzki, I. Lundström, and H. Arwin, Sens. and Actuators B 44, 243 (1997).