Advances in RF MEMS technology

Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)

Volumn , Issue , 2003, Pages 17-20

  Pillans, Brandon ^a   Rebeiz, Gabriel ^b   Lee, Jeong Bong ^c  

^a RAYTHEON COMPANY   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

^c UNIVERSITY OF TEXAS AT DALLAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONICS PACKAGING; MICROMACHINING; MICROWAVE CIRCUITS; TECHNOLOGICAL FORECASTING;

BULK MICROMACHINING; SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0347566335     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/gaas.2003.1252353     Document Type: Conference Paper

References (19)

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