Quantitative analysis of the atomic nitrogen concentration in a remote plasma by means of mass spectrometry

Plasma Sources Science and Technology

Volumn 11, Issue 1, 2002, Pages 60-68

  Douai, D ^a   Berndt, J ^a   Winter, J ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; ELECTROMAGNETIC WAVES; FREE RADICALS; IONIZATION CHAMBERS; MASS SPECTROMETRY; NITROGEN; ORIFICES; PRESSURE EFFECTS; SURFACE WAVES;

ATOMIC NITROGEN CONCENTRATION; MODULATED BEAM MASS SPECTROSCOPY; REMOTE PLASMA;

PLASMAS;

EID: 0036465466     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/11/1/308     Document Type: Article

References (18)