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Applied Surface Science

Volumn 138-139, Issue 1-4, 1999, Pages 543-548

Deposition of SiC and AlN thin films by laser ablation

(4) Meinschien, Jens a Falk, Fritz a Hobert, Hartmut b Stafast, Herbert a

a LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY (Germany)

b FRIEDRICH SCHILLER UNIVERSITY JENA (Germany)

Author keywords

AlN; Infrared spectroscopy; Laser ablation; SiC; Transmission electron microscopy

Indexed keywords

EID: 0347031965 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(98)00451-6 Document Type: Article

Times cited : (27)

References (18)

1
- 0032000572
- M. Diegel, F. Falk, H. Hobert, R. Hergt, H. Stafast, Appl. Phys. A 66 (1998) 183.
- (1998) Appl. Phys. A , vol.66 , pp. 183
- Diegel, M.¹ Falk, F.² Hobert, H.³ Hergt, R.⁴ Stafast, H.⁵

2
- 84946394908
- J.J. Berzelius, Ann. Phys. 77 (1824) 169.
- (1824) Ann. Phys. , vol.77 , pp. 169
- Berzelius, J.J.¹

3
- 0031189326
- J.A. Cooper Jr., Phys. Status Solidi (a) 202 (1997) 305.
- (1997) Phys. Status Solidi (A) , vol.202 , pp. 305
- Cooper J.A., Jr.¹

4
- 0031190136
- M. Bakowski, U. Gustafsson, U. Lindefeldt, Phys. Status Solidi (a) 202 (1997) 421.
- (1997) Phys. Status Solidi (A) , vol.202 , pp. 421
- Bakowski, M.¹ Gustafsson, U.² Lindefeldt, U.³

5
- 0031536325
- J. Takahashi, N. Ohtani, Phys. Status Solidi (b) 202 (1997) 163.
- (1997) Phys. Status Solidi (B) , vol.202 , pp. 163
- Takahashi, J.¹ Ohtani, N.²

6
- 0041105175
- G. Augustine, H.McD. Hobgood, V. Balskrishna, G. Dunne, R.H. Hopkins, Phys. Status Solidi (b) 202 (1997) 137.
- (1997) Phys. Status Solidi (B) , vol.202 , pp. 137
- Augustine, G.¹ Hobgood, H.McD.² Balskrishna, V.³ Dunne, G.⁴ Hopkins, R.H.⁵

7
- 0031525360
- R. Rupp, Y. Makarov, H. Behner, A. Wiedenhofer, Phys. Status Solidi (b) 202 (1997) 281.
- (1997) Phys. Status Solidi (B) , vol.202 , pp. 281
- Rupp, R.¹ Makarov, Y.² Behner, H.³ Wiedenhofer, A.⁴

8
- 0031515387
- H. Nagasawa, K. Yagi, Phys. Status Solidi (b) 202 (1997) 335.
- (1997) Phys. Status Solidi (B) , vol.202 , pp. 335
- Nagasawa, H.¹ Yagi, K.²

9
- 0029309646
- T. Hatayama, Y. Tarni, T. Fuyuki, H. Matsunami, J. Cryst. Growth 150 (1995) 934.
- (1995) J. Cryst. Growth , vol.150 , pp. 934
- Hatayama, T.¹ Tarni, Y.² Fuyuki, T.³ Matsunami, H.⁴

10
- 0031118504
- K. Pfennighaus, A. Fissel, U. Kaiser, M. Wendt, J. Kräuslich, G. Peiter, B. Schröter, W. Richter, Mat. Sci. Eng. B 46 (1997) 164.
- (1997) Mat. Sci. Eng. B , vol.46 , pp. 164
- Pfennighaus, K.¹ Fissel, A.² Kaiser, U.³ Wendt, M.⁴ Kräuslich, J.⁵ Peiter, G.⁶ Schröter, B.⁷ Richter, W.⁸

11
- 0000722347
- M. Balooch, R.J. Tench, W.J. Siekhaus, M.J. Allan, A.L. Connor, D.R. Olander, Appl. Phys. Lett. 57 (15) (1990) 1540.
- (1990) Appl. Phys. Lett. , vol.57 , Issue.15 , pp. 1540
- Balooch, M.¹ Tench, R.J.² Siekhaus, W.J.³ Allan, M.J.⁴ Connor, A.L.⁵ Olander, D.R.⁶

12
- 0003093179
- L. Rimai, R. Ager, W.H. Weber, J. Hangas, B.D. Poindexter, Appl. Phys. Lett. 65 (17) (1994) 2171.
- (1994) Appl. Phys. Lett. , vol.65 , Issue.17 , pp. 2171
- Rimai, L.¹ Ager, R.² Weber, W.H.³ Hangas, J.⁴ Poindexter, B.D.⁵

13
- 0001415536
- M.G. Norton, P.G. Kotula, C.B. Carter, J. Appl. Phys. 70 (5) (1991) 2871.
- (1991) J. Appl. Phys. , vol.70 , Issue.5 , pp. 2871
- Norton, M.G.¹ Kotula, P.G.² Carter, C.B.³

14
- 0031131274
- R.D. Vispute, J. Narayan, J.D. Budai, Thin Solid Films 299 (1997) 94.
- (1997) Thin Solid Films , vol.299 , pp. 94
- Vispute, R.D.¹ Narayan, J.² Budai, J.D.³

15
- 0031366386
- J.H. Edgar, Z.J. Yu, D.J. Smith, J. Chaudhuri, X. Cheng, J. Electr. Mater. 26 (12) (1997) 1389.
- (1997) J. Electr. Mater. , vol.26 , Issue.12 , pp. 1389
- Edgar, J.H.¹ Yu, Z.J.² Smith, D.J.³ Chaudhuri, J.⁴ Cheng, X.⁵

16
- 36449005199
- L.B. Rowland, R.S. Kern, S. Tanaka, R.F. Davis, Appl. Phys. Lett. 62 (1993) 3333.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 3333
- Rowland, L.B.¹ Kern, R.S.² Tanaka, S.³ Davis, R.F.⁴

17
- 0030565969
- H. Stafast, L. Redlich, T. Köhler, K. Steenbeck, M. Diegel, Appl. Surf. Sci. 106 (1996) 335.
- (1996) Appl. Surf. Sci. , vol.106 , pp. 335
- Stafast, H.¹ Redlich, L.² Köhler, T.³ Steenbeck, K.⁴ Diegel, M.⁵

18
- 7744225077
- L.E. Mc Neil, M. Grimsditch, R.H. French, J. Am. Ceram. Soc. 76 (1993) 1132.
- (1993) J. Am. Ceram. Soc. , vol.76 , pp. 1132
- Mc Neil, L.E.¹ Grimsditch, M.² French, R.H.³

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