Laser surface interaction during and after deposition of thin oxide films

Applied Surface Science

Volumn 106, Issue , 1996, Pages 335-340

  Stafast, H ^a,b   Redlich, L ^b   Kohler T ^b   Steenbeck, K ^b   Diegel, M ^c  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b LEIBNIZ INSTITUTE OF PHOTONIC TECHNOLOGY   (Germany)

^c GOETHE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; EXCIMER LASERS; HIGH TEMPERATURE SUPERCONDUCTORS; JOSEPHSON JUNCTION DEVICES; LASER BEAM EFFECTS; OXIDE SUPERCONDUCTORS; PERMITTIVITY; PHOTOCHEMICAL REACTIONS; SILICON WAFERS; SQUIDS; SUPERCONDUCTING FILMS; THIN FILMS;

LASER SURFACE INTERACTION;

LASER ABLATION;

EID: 0030565969     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00372-8     Document Type: Article

References (14)

1. D. Bäuerle, Chemical Processing with Lasers (Springer, Berlin, 1986).
2. M. von Allmen, Laser-Beam Interactions with Materials (Springer, Berlin, 1987).
3. I.W. Boyd, Laser Processing of Thin Films and Microstructures (Springer, Berlin, 1987).
4. D.J. Ehrlich and J.Y, Tsao, Eds., Laser Microfabrication, Thin Film Processes and Lithography (Academic Press, Boston, MA, 1989).
5. I.W. Boyd and R.B. Jackman, Eds., Photochemical Processing of Electronic Materials (Academic Press, London, 1992).
6. H. Stafast, Angewandte Laserchemie (Springer, Berlin, 1993).
7. D.E. Chrisey and O.K. Hubler, Eds., Pulsed Laser Deposition of Thin Films (Wiley, New York, 1994).
8. J. Dieleman, U.K.P, Biermann and P, Hess, Eds., Photon-As-sisted Processing of Surfaces and Thin Films (Elsevier, Amsterdam, 1995).
9. E. von der Burg, W. Grill, M. Diegel and H. Stafast, Mater. Sci. Eng. B 13 (1992) 25.
10. E. von der Burg, M. Diegel, H. Stafast and W. Grill, Appl. Phys. A 54 (1992) 373.
11. E. Heinz, F. Schmidl, H. Schneidewind, P. Seidel, L. Dörrer, H. Töpfer, G. Hildebrandt, T. Köhler, K. Zach and T. Schmauder, in: Proc. 4th Int. Superconductor Electronics Conf. (IDEC '93), Boulder, CO, 1993) p. 160.
12. M. Diegel, T. Hildenbrandt and H. Stafast, in: Proc. 2nd EUREKA 205 Workshop on Eximer Laser Applications, Erlangen, 1993, Eds. H.W, Bergmann and K. Schutte, p. 39.
13. F. Schmidl, L. Dörrer, P. Seidel, A. Matthes, E. Heinz, T. Köhler and H. Töpfer, in: Applied Superconductivity, Vol. 2, Ed. H.C. Freyhardt (DGM, Göttingen, 1993) p. 1163.
14. K. Steenbeck, E. Steinbeiß, T. Eick, T. Köhler, L. Redlich and H. Schmidt, in: Applied Superconductivity, Vol. 2, Ed. H.C. Freyhardt (DGM, Göttingen, 1993) p. 1593.