SCOPUS 정보 검색 플랫폼

Volumn 15, Issue 1, 2000, Pages 203-211

Adhesion and reliability of copper interconnects with Ta and TaN barrier layers

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; DIELECTRIC MATERIALS; DIFFUSION; ELECTROMIGRATION; ENERGY DISSIPATION; METALLIZING; PLASTICITY; TANTALUM COMPOUNDS; THERMAL EXPANSION;

COPPER INTERCONNECTS;

COPPER;

EID: 0033990021 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2000.0033 Document Type: Article

Times cited : (190)

References (28)

4
- 0025471333
- (1990) Thin Solid Films , vol.189 , pp. 269
- Stolt, L.¹ D'Heurle, F.M.²

7
- 0000684975
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1736
- Holloway, K.¹ Fryer, P.²

8
- 71149121504
- edited by J.W. Hutchinson and T.Y. Yu (Academic Press, New York)
- (1991) Advances in Applied Mechanics , pp. 63-191
- Hutchinson, J.W.¹ Suo, Z.²

9
- 0031357479
- Materials Reliability in Microelectronics VII, edited by J.J. Clement, R.R. Keller, K.S. Krisch, J.E. Sanchez, Jr., and Z. Zuo (Pittsburgh, PA)
- (1997) Mater. Res. Soc. Symp. Proc. , vol.473 , pp. 21-26
- Lane, M.¹ Dauskardt, R.H.² Ware, R.³ Ma, Q.⁴ Fujimoto, H.⁵

10
- 0031384881
- Materials Reliability in Microelectronics VII, edited by J.J. Clement, R.R. Keller, K.S. Krisch, J.E. Sanchez, Jr., and Z. Zuo (Pittsburgh, PA)
- (1997) Mater. Res. Soc. Symp. Proc. , vol.473 , pp. 3-14
- Ma, Q.¹ Bumgarner, J.² Fujimoto, H.³ Lane, M.⁴ Dauskardt, R.H.⁵

12
- 0031643231
- Thin-Films - Stresses and Mechanical Properties VII, edited by R.C. Cammarata, M.A. Nastasi, E.P. Busso, and W.C. Oliver (Warrendale, PA)
- (1998) Mater. Res. Soc. Symp. Proc. , vol.505 , pp. 357-362
- Lane, M.¹ Dauskardt, R.H.² Ma, Q.³ Fujimoto, H.⁴ Krishna, N.⁵

13
- 0024629574
- (1989) Acta Metall. , vol.37 , pp. 909
- Evans, A.G.¹ Hutchinson, J.W.²

18
- 84977695915
- (1967) J. Am. Ceram. Soc. , vol.50 , pp. 407
- Wiederhorn, S.M.¹

22
- 0004129864
- Elsevier Science Publishers, New York
- (1992) Strength and Fracture of Glass and Ceramics
- Mencik, J.¹

24
- 0024301217
- (1989) Mater. Sci. Eng. , vol.A107 , pp. 23
- Rice, J.R.¹ Wang, J.S.²

27
- 85008483519
- Stanford University (1999, unpublished results)
- Lane, M.¹ Vainchtein, A.² Gao, H.³ Dauskardt, R.H.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.