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Volumn 340-342, Issue , 2003, Pages 705-709
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Radiation hardness of silicon - A challenge for defect engineering
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Author keywords
Cz; Defect engineering; Epitaxial silicon; FZ; Radiation hardness
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Indexed keywords
ACTIVATION ENERGY;
CRYSTAL GROWTH FROM MELT;
DEFECTS;
DOPING (ADDITIVES);
ELECTRIC CURRENT MEASUREMENT;
EPITAXIAL GROWTH;
HIGH ENERGY PHYSICS;
PARTICLE DETECTORS;
PROTONS;
RADIATION DAMAGE;
RADIATION HARDENING;
DEFECT ENGINEERING;
EPITAXIAL SILICON;
FLOAT ZONE (FZ) SILICON;
SILICON;
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EID: 0346504191
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physb.2003.09.238 Document Type: Conference Paper |
Times cited : (9)
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References (18)
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