Semiconductor nanowires surrounded by cylindrical Al2O3 shells

Journal of Electronic Materials

Volumn 32, Issue 11, 2003, Pages 1344-1348

  Min, Byungdon ^a   Lee, Jong Soo ^a   Cho, Kyoungah ^a   Hwang, Ju Won ^a   Kim, Hyunsuk ^a   Sung, Man Young ^a   Kim, Sangsig ^a   Park, Jeunghee ^a   Seo, Hee Won ^a   Bae, Seung Yong ^a   Lee, Moon Sook ^b   Park, Soon Oh ^b   Moon, Joo Tae ^b  

^a Korea University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

Al2O3 shells; Nanowires; Transmission electron microscopy (TEM)

Indexed keywords

ALUMINA; AMORPHOUS MATERIALS; CONFORMATIONS; CRYSTAL LATTICES; CRYSTAL STRUCTURE; DEPOSITION; FIELD EFFECT TRANSISTORS; SEMICONDUCTOR GROWTH; SEMICONDUCTOR MATERIALS; SYNTHESIS (CHEMICAL); THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

ATOMIC LAYER DEPOSITION; SEMICONDUCTOR NANOWIRES; TRIMETHYLALUMINUM;

NANOSTRUCTURED MATERIALS;

EID: 0346216010     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-003-0034-1     Document Type: Article

References (19)

1. J.W. Klaus, A.W. Ott, A.C. Dillon, and S.M. George, Surf. Sci. 418, L14 (1998).
2. A. Paranjpe, S. Gopinath, T. Omstead, and R. Bubber, J. Electrochem. Soc. 148, G465 (2001).
3. H.W. Seo, S.Y. Bae, J. Park, H. Yang, and S. Kim, Chem. Commun. 21, 2564 (2002).
4. Y. Kim, S.M. Lee, C.S. Park, S.I. Lee and M.Y. Lee, Appl. Phys. Lett. 71, 3604 (1997).
5. Y. Widjaja and C.B. Musgrave, Appl. Phys. Lett. 80, 3304 (2002).
6. A.W. Ott, K.C. McCarley, J.W. Klaus, J.D. Way, and S.M. George, Appl. Surf. Sci. 107, 128 (1996).
7. B. Lux, C. Colombier, H. Altena, and K. Stjernberg, Thin Solid Films 138, 49 (1986).
8. M. D. Groner, J.W. Elam, F.H. Fabreguette, and S.M. George, Thin Solid Films 414, 43 (2002).
9. M. Juppo, A. Rahtu, M. Ritala, and Leskela, Langmuir 16, 4034 (2000).
10. W.S. Yang, Y.K. Kim, S.Y. Yang, J.H. Choi, H.S. Park, S.I. Lee, and J.B. Yoo. Surf. Coatings Technol. 131, 79 (2000).
11. L.J. Lauhon, M.S. Gudiksen, D. Wang, and C.M. Lieber, Nature 420, 57 (2002).
12. W.H. Ha, M.J. Choo, and S. Im, J. Non-Crystalline Solids 303, 78 (2002).
13. H.W. Seo, S.Y. Bae, J. Park, H. Yang, K.S. Park, and S. Kim, J. Chem. Phys. 116, 9492 (2002).
14. H.Y. Kim, J. Park, and H. Yang, Chem. Commun. 2, 256 (2003).
15. K. Park, J.S. Lee, M.Y. Sung, and S. Kim, Jpn. J. Appl. Phys. 41, 7317 (2002).
16. H. Iizuka, K. Yokoo, and S. Ono, Appl. Phys. Lett. 61, 2978 (1992).
17. A. Yamada, B. Sang, and M. Konagai, Appl. Surf. Sci. 112, 216 (1997).
18. H. Gumagai, M. Matsumoto, K. Toyoda, M. Obara, and M. Suzuki, Thin Solid Films 263, 47 (1995).
19. J.W. Elam, Z.A. Sechrist, and S.M. George, Thin Solid Films 414, 43 (2002).