Photoplastic near-field optical probe with sub-100 nm aperture made by replication from a nanomould

Journal of Microscopy

Volumn 209, Issue 3, 2003, Pages 267-271

  Kim, G M ^a   Kim, B J ^b,c   Ten Have, E S ^b   Segerink, F ^b   Van Hulst, N F ^b   Brugger, J ^a  

^a Ecl Polytech Federale L   (Switzerland)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c Kyungpook National University   (South Korea)

Author keywords

Microfabrication; Nanomould; NSOM; Self assembled monolayer; SU 8

Indexed keywords

LIGHT TRANSMISSION; MICROANALYSIS; MOLDS; NANOTECHNOLOGY; OPTICAL DATA PROCESSING; PROBES; SELF ASSEMBLED MONOLAYERS; SILICON WAFERS;

EPOXY; MICRO-FABRICATION; NANO-SCALE APERTURE; NANOMETRES; NANOMOLDS; NEAR-FIELD OPTICAL PROBES; SU-8; SUB-100 NM; SURFACE CONTOUR; THIN METAL FILMS;

MICROFABRICATION;

POLYMER;

ARTICLE; OPTICAL RESOLUTION; OXIDATION; PRIORITY JOURNAL; SCANNING NEAR FIELD OPTICAL MICROSCOPY;

EID: 0345701395     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.2003.01134.x     Document Type: Article

References (17)

1. Abraham, M., Ehrfeld, W., Lacher, M., Mayr. K., Noell, W., Guthner, P. & Barenz, J. (1998) Micromachined aperture probe tip for multifunctional scanning probe microscopy. Ultramicroscopy, 71, 93-98.
2. Akamine, S. & Quate, C.F. (1992) Low-temperature thermaloxidation sharpening of microcast tips. J. Vacuum Sci. Technol. B, 10, 2307-2310.
3. Ash, E.A. & Nicholls, G. (1972) Nature, 237, 510.
4. Betzig, E., Trautman, J.K., Harris, T.D., Weiner, J.S. & Kostelak, R.L. (1991) Article title. Science, 251, 1468.
5. Eckert, R., Freyland, J.M., Gersen, H., et al. (2001) Near-field optical microscopy based on microfabricated probes. J. Microsc. 202, 7-11.
6. Genolet, G., Despont, M., Vettiger, P., et al. (2001) Micromachined photoplastic probe for scanning near-field optical microscopy. Rev. Sci. Instrum. 72, 3877-3879.
7. Hoffmann, P., Dutoit, B. & Salathe, R.-P. (1995) Comparison of mechanically drawn and protection layer chemically etched optical fiber tips. Ultramicroscopy, 61, 165-170.
8. Kim, B.J., Flamma, J.W., ten Have, E.S., Garcia-Parajo, M.E., van Hulst, N.F. & Brugger, J. (2001) Moulded photoplastic probes for near-field optical applications. J. Microsc. 202, 16-21.
9. Kim, G.M., Kim, B.J., Liebau, M., Huskens, J., Reinhoudt, D.N. & Brugger, J. (2002a) Surface modification with self-assembled monolayers for nanoscale replication of photoplastic MEMS. J. Microelectromech. Syst. 11, 175-181.
10. Kim, G.M., Kovalgin, A., Holleman, J. & Brugger, J. (2002b) Nanomold radius control by thermal oxidation sharpening and wet etching. J. Nanoscience Nanotechnol. 2, 55-59.
11. Marcus, R.B., Ravi, T.S., Gmitter, T., et al. (1990) Formation of silicon tips with < 1 nm radius. Appl. Phys. Lett. 56, 236-238.
12. Pohl, D.W., Denk, W. & Lanz, M. (1984) Optical sthetoscopy: image recording with resolution 1/20. Appl. Phys. Lett. 4, 651-653.
13. Ruiter, A.G.T., Veerman, J.A., Garcia-Parajo, M.F. & van Hulst, N.F. (1997a) Article title. J. Phys. Chem. A, 101, 7318.
14. Ruiter, A.G.T., Veerman, J.A., van der Werf, K.O. & van Hulst, N.F. (1997b) Dynamic behavior of tuning fork shear force feedback. Appl. Phys. Lett. 71, 28-30.
15. Stöckle, R., Fokas, C., Deckert, V. & Zenobi, R. (1999) High-quality near-field optical probes by tube etching. Appl. Phys. Lett. 75, 160-162.
16. Veerman, J.A. et al. (1999) J. Microsc. 194, 477.
17. Veerman, J.A., Otter, A.M., Kuipers, L. & van Hulst, N.F. (1998) High definition aperture probes for near-field optical microscopy fabricated by focused ion beam milling. Appl. Phys. Lett. 72, 3115-3117.