Reactor geometry and plasma uniformity in a planar inductively coupled radio frequency argon discharge

Plasma Sources Science and Technology

Volumn 5, Issue 3, 1996, Pages 429-435

  Stittsworth, J A ^a   Wendt, A E ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC DISCHARGES; ELECTRIC FIELDS; ELECTRON TRANSPORT PROPERTIES; IONIZATION CHAMBERS; IONIZATION OF GASES; LOOP ANTENNAS; PLASMA DENSITY; PLASMA HEATING; PLASMA PROBES;

ELECTRON HEATING; PLASMA UNIFORMITY;

PLASMA SOURCES;

EID: 0030204734     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/3/011     Document Type: Article

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