Radio frequency inductive discharge source design for large area processing

Pure and Applied Chemistry

Volumn 68, Issue 5, 1996, Pages 1055-1058

  Wendt, A E ^a   Mahoney, L J ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041588731     PISSN: 00334545     EISSN: None     Source Type: Journal    
DOI: 10.1351/pac199668051055     Document Type: Article

References (2)

1. J. H. Keller, J. C. Forster and M. S. Barnes, J. Vac. Sci. Technol. A 11, 2487 (1993).
2. L. J. Mahoney, A. E. Wendt, E. Barrios, C. Richards and J. L. Shohet, J. Appl. Phys. 76, 2041 (1994).