Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

Physics of Plasmas

Volumn 10, Issue 4, 2003, Pages 1146-1151

  Ostrikov, K ^a,b   Tsakadze, E ^b,c   Xu, S ^b   Vladimirov, S V ^d   Storer, R ^a  

^a FLINDERS UNIVERSITY   (Australia)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^d UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC FIELD EFFECTS; ELECTROSTATICS; MATHEMATICAL MODELS; NANOTUBES; PLASMA PROBES; PLASMA SOURCES;

MAGNETIC PROBES;

INDUCTIVELY COUPLED PLASMA;

EID: 0345373814     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1557871     Document Type: Article

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