Surface topography evolution and fatigue fracture of polysilicon

Journal of Materials Science

Volumn 38, Issue 20, 2003, Pages 4145-4155

  Allameh, S M ^a   Shrotriya, P ^a   Butterwick, A ^b   Brown, S ^c   Yao, Nan ^a   Soboyejo, W ^a  

^a Princeton University   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

^c EXPONENT INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK PROPAGATION; FATIGUE OF MATERIALS; FRACTURE TOUGHNESS; KINETIC THEORY; MICROELECTROMECHANICAL DEVICES; MORPHOLOGY; NUCLEATION; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACE TOPOGRAPHY;

FATIGUE CRACK NUCLEATION; FATIGUE CYCLING; FATIGUE FRACTURE; MICROMECHANISM;

POLYSILICON;

EID: 0345015818     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1026377522033     Document Type: Article

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