Instability of an elastically compressed silicon surface under etching

Physics of the Solid State

Volumn 41, Issue 8, 1999, Pages 1295-1297

  Shreter, Yu G ^a   Tarkhin, D V ^a   Khorev, S A ^a   Rebane, Yu T ^a  

^a IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033244023     PISSN: 10637834     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1130985     Document Type: Article

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