Measurement of slow crack growth in silicon and nickel micromechanical devices

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 99-104

  Brown, Stuart B ^a   Povirk, Gary ^a   Connally, John ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK PROPAGATION; NICKEL; SILICON;

CANTILEVER BEAMS; NICKEL MICROMECHANICAL DEVICES;

ELECTROMECHANICAL DEVICES;

EID: 0027149044     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)