Surface topology and fatigue in Si MEMS structures

ASTM Special Technical Publication

Volumn , Issue 1413, 2001, Pages 3-15

  Allameh, S M ^a   Gally, B ^b   Brown, S ^b   Soboyejo, W O ^a  

^a PRINCETON UNIVERSITY   (United States)

^b EXPONENT INC   (United States)

Author keywords

AFM; Morphology; Si MEMS; Surface; Topology

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRACK PROPAGATION; FATIGUE OF MATERIALS; MICROSTRUCTURE; MORPHOLOGY; NUCLEATION; POLYSILICON; SURFACE TOPOGRAPHY;

CRACK NUCLEATION; OPTICAL ENCODERS; SI MEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 8844257320     PISSN: 00660558     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1520/stp10976s     Document Type: Conference Paper

References (24)

1. Wise, K. D. and Najafi, K., "Microfabrication Techniques for Integrated Sensors and Microsystems," Science, Nov. 1991, Vol. 254, No. 5036, pp. 1335-1342.
2. Madou, M., Fundamentals of Microfabrication, CRC Press, New York, 1997.
3. Togawa, T., Biomedical Transducers and Instruments, CRC Press, 1997.
4. Connally, J. A. and Brown, S. B., "Slow Crack Growth in Single-Crystal Silicon," Science, 1992, Vol. 256, pp. 1537-39.
5. Connally, J. A., and Brown, S. B., "Micromechanical Fatigue Testing," Experimental Mechanics, June 1993, Vol. 33, pp. 81-90.
6. Brown, S., Povuk, G., and Connally, J., "Measurement of Slow Crack Growth in Silicon and Nickel Micromechanical Devices," Proceedings of MEMS-93, Fort Lauderdale, FL, 7-10 Feb. 1993, pp. 99-104.
7. Brown, S. B., Van Arsdell, W., and Muhlstein, C. L., "Materials Reliability in MEMS Devices," Proceedings, Transducers 97, International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers, Vol. 1, 1997, pp. 591-593.
8. Kahn, H., Ballarini, R. L., Mullen, R., and Heuer, A. H., "Electrostatically Actuated Failure of Microfabricated Polysilicon Fracture Mechanics Specimens," Proceedings of the Royal Society, Series A (Mathematical, Physical and Engineering Sciences) Vol. 455, No. 1990, 1999, pp. 3807-3823.
9. Sharpe, Jr., W. N. and Turner, K. T., "Fatigue Testing of Materials Used in Microelectromechanical Systems," Proceedings, Fatigue 99, 1999, pp. 1837-1844.
10. Sharpe, W. N., Jr., Yuan, B., and Edwards, R. L., "Fracture Tests of Polysilicon films," Journal of Microelectromechanical Systems, 1997, Vol. 6, pp. 193- 199.
11. Marxer, C., Gretillat, M. A., de Rooij, N. J., Battig, R., Anthametten, O., Valk, B., and Vogel, P., "Reliability Considerations for Electrostatic Polysilicon Actuators Using as an Example the REMO Component," Sensors and Actuators, 1997, Vol. 61, pp. 449-454.
12. Douglass, M. R., "Lifetime Estimates and Unique Failure Mechanisms of the Digital Micromirror Device (DMD)," Proceedings, IEEE International Reliability Symposium, Reno, IEEE, Piscataway, NJ, 1998, pp. 9-16.
13. Minoshima, K., Inoue, S., Terada, T., and Komai, K., "Influence of Specimen Size and Sub-Micron Notch on the Fracture Behavior of Single Crystal Silicon Microelements and Nanoscopic AFM Damage Evaluation," Materials Science of Microelectromechanical Systems (MEMS) Devices Symposium, MRS, 1999, pp. 15-20.
14. Mohr, J. and Strohrmann, M., "Examination of Long-Term Stability of Metallic LIGA Microstructures by Electromagnetic Activation," Journal of Micromechanics and Microengineering, 1992, Vol. 2, pp. 193-195.
15. Cornella, G., Vinci, R. P., Suryanarayanan Iyer, R., Dauskardt, R. H., and Bravman, J. C., "Observations of Low Cycle Fatigue of Al Thin Films for MEMS Applications," Materials Research Society Symposium Proceedings, 1998, Vol. 518, pp. 81-88.
16. Suresh, S., Fatigue of Materials, 2nd ed., Cambridge University Press, 1998.
17. Van Arsdell, W. and Brown, S. B., Proceedings of the ASME Symposium on Micro-Electro-Mechanical Systems (MEMS) Structures, ASME, New York, NY, 1998, pp. 267-272.
18. Brown, S. B., Van Arsdell, W., and Muhlstein, C. L., "Materials Reliability in MEMS Devices," Proceedings of the IEEE Conference on Solid-State Sensors and Actuators, IEEE, Piscataway, NJ, 1997, Vol. 1, pp. 591-593.
19. Provost, J. H., Baker, T.-J., Liang, J., and Suo, Z., "A Finite Element Model of Stress-Assisted Surface Reaction and Delayed Fracture," International Journal of Solids and Structures, submitted.
20. Van Arsdell, W., "Sub-Critical Crack Growth in Polysilicon MEMS," Ph.D. thesis, Massachusetts Institute of Technology, 1997.
21. Freeman, D. M., Aranyosi, A. J., Gordon, M. J., and Hong, S. S., "Multidimensional Motion Analysis of MEMS Using Computer Microvision," Proceedings of the. Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 1998, pp. 150-155.
22. Quentin Davis, C. and Freeman, D.M., "Using a Light Microscope to Measure Motions with Nanometer Accuracy," Optical Engineering, Vol. 37, 1998, pp. 1299-1304.
23. Ritchie, R. O., "Mechanisms of Fatigue Crack Propagation in Metals, Ceramics and Composites: Role of Crack Tip Shielding," Materials Science Engineering A, Vol. A103, 1988, pp. 15-28.
24. Ghandhi, S. K., "Native Oxide Films," in VLSI Fabrication Principles, Wiley, New York, 1983.