Downstream plasma characteristics from a single loop antenna in a helicon processing reactor

Plasma Sources Science and Technology

Volumn 8, Issue 3, 1999, Pages 432-439

  Carter, C ^a   Khachan, J ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPUTER SIMULATION; ELECTRONS; HELICONS; IONS; LOOP ANTENNAS; MAGNETIC FIELD EFFECTS; MAGNETOPLASMA; PLASMA DENSITY;

ION DENSITY; LOW MAGNETIC FIELD; PLASMA DENSITY MEASUREMENT; SINGLE LOOP ANTENNA;

PLASMA SOURCES;

EID: 0032643966     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/8/3/313     Document Type: Article

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