Radio frequency power deposition in a high-density helicon discharge with helical antenna coupling

Physics of Plasmas

Volumn 7, Issue 10, 2000, Pages 4308-4319

  Enk, Th ^a   Kramer M ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000680751     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1288399     Document Type: Article

References (20)

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