Pulsed laser deposition of ZnO thin films on silicon and sapphire

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5121, Issue , 2002, Pages 317-324

  Khudobenko, A I ^a   Zherikhin, A N ^a   Williams, R T ^b   Wilkinson, J ^b   Ucer, K B ^b   Xiong, G ^b   Voronov, V V ^c  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

^b WAKE FOREST UNIVERSITY   (United States)

^c PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

Author keywords

Photoluminescence; Pulsed laser deposition; Zinc oxide

Indexed keywords

CRYSTAL STRUCTURE; DOPING (ADDITIVES); ELECTRIC PROPERTIES; PHOTOLUMINESCENCE; PULSED LASER DEPOSITION; SAPPHIRE; SILICON; ZINC OXIDE;

DOPANTS; MICROPARTICLES;

THIN FILMS;

EID: 0344944767     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.515618     Document Type: Conference Paper

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