Chemical Modification of Titanium Nitride Films via Ion Implantation

Materials Transactions

Volumn 44, Issue 10, 2003, Pages 1962-1970

  Aizawa, Tatsuhiko ^a   Mitsuo, Atsushi ^b   Akhadejdamrong, Thananan ^c  

^a UNIVERSITY OF TOKYO   (Japan)

^b Tokyo Metropolitan Inst Technol   (Japan)

^c Natl Metal/Mat Technology Center   (China)

Author keywords

Chemical modification; Ion implantation; Surface nano structuring; Titanium nitride film; Wear and oxidation resistance

Indexed keywords

CERAMIC COATINGS; CHEMICAL BONDS; CHEMICAL MODIFICATION; FRICTION; ION IMPLANTATION; KINETIC ENERGY; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; OXIDATION RESISTANCE; OXYGEN; SOLID SOLUTIONS; SURFACE REACTIONS; SURFACE STRUCTURE; WEAR RESISTANCE;

SURFACE NANO-STRUCTURING; VICINITY;

TITANIUM NITRIDE;

EID: 0344685537     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.44.1962     Document Type: Conference Paper

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