Carbon, nitrogen and oxygen implantation into TiN coatings

Surface and Coatings Technology

Volumn 108-109, Issue 1-3, 1998, Pages 271-275

  Seidel, F ^a   Stock, H R ^a   Mayr, P ^a  

^a STIFTUNG INSTITUT FÜR WERKSTOFFTECHNIK   (Germany)

Author keywords

GDOS; Hard coatings; Hardness; Ion implantation; Morphology; TiN; XPS

Indexed keywords

CARBON; COLOR; COMPOSITION EFFECTS; HARDNESS; ION IMPLANTATION; MORPHOLOGY; NITROGEN; OXYGEN; PRECIPITATION (CHEMICAL); TITANIUM NITRIDE; VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

GLOW DISCHARGE OPTICAL SPECTROSCOPY (GDOS); HARD COATINGS; PHYSICAL VAPOR DEPOSITION (PVD);

CERAMIC COATINGS;

COATING; ION IMPLANTATION; TITANIUM NITRIDE; WEAR RESISTANCE;

EID: 0032505862     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00562-3     Document Type: Article

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