On the influence of carbon implantation on the structural properties of hard TiN coatings studied by glancing incidence X-ray diffraction

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 179, Issue 1, 2001, Pages 42-54

  Tagliente, M A ^a   Falcone, R ^b   Mello, D ^b   Esposito, C ^a   Tapfer, L ^a  

^a Centro Nazionale per la Ricerca e lo Sviluppo dei Materiali   (Italy)

^b UNIVERSITY OF SALENTO   (Italy)

Author keywords

Carbon ion implantation; Glancing incidence X ray diffraction; Residual stress; Titanium nitride

Indexed keywords

CARBON; CHEMICAL MODIFICATION; COMPRESSIVE STRESS; ION IMPLANTATION; PHYSICAL VAPOR DEPOSITION; RESIDUAL STRESSES; SECONDARY ION MASS SPECTROMETRY; STEEL; STRESS ANALYSIS; SUBSTRATES; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

GLANCING INCIDENCE X RAY DIFFRACTION;

PROTECTIVE COATINGS;

EID: 0035370919     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00346-9     Document Type: Article

References (35)

1. K. Holmberg, A. Matthews (Eds.), Coatings Tribology: Properties, Technique and Applications in Surface Engineering, Tribology Series, Vol. 28, Elsevier, Amsterdam, The Netherlands, 1994.
2. Peuttinen I.M., Korhonen A.S., Harju E., Turnia M.A., Forséu O., Ristolainen E.O. Surf. Coat. Technol. 50:1992;161.
3. Andriesvki R.A., Anisimova I.A., Anisimov V.P. Thin Solid Films. 205:1991;171.
4. Leoni M., Scardi P., Rossi S., Fedrizzi L., Massiani Y. Thin Solid Films. 345:1999;263.
5. Rossi S., Fedrizzi L., Leoni M., Scardi P., Massiani Y. Thin Solid Films. 350:1999;161.
6. Huang C.-T., Duh J.-G. Vacuum. 46(12):1995;1465.
7. Perry A.J., Valvoda V., Rafaja D., Williamson D.L., Sartwell B.D. Surf. Coat. Technol. 54/55:1992;180.
8. Perry A.J., Treglio J.R., Valvoda V., Rafaja D. J. Vac. Sci. Technol. A. 13(3):1995;1067.
9. Sansom D., Viviente J.L., Alonso F., Ugarte J.J., Oñate J.I. Surf. Coat. Technol. 84:1996;519.
10. Koerber F.J., Petersein H., Rauke H. Thin Solid Films. 181:1989;505.
11. Franck M., Blaupain B., Celis J.P., Roos J.R., Pattyn H. J. Vac. Sci. Technol. B. 12:1994;981.
12. Roos J.R., Celis J.P., Franck M., Pattyn H. Surf. Coat. Technol. 45:1991;89.
13. Liu L.J., Sood D.K., Manory R.R., Zhou W. Surf. Coat. Technol. 71:1995;159.
14. Rodrigo M.T., Jiménez C., Vazquez L., Alonso F., Fernández M., Martínez-Duart J.M. J. Mater. Res. 13(8):1998;2117.
15. Quacyhaegens C., Stals L.M., Van Stappen M., De Schepper L. Thin Solid Films. 197:1991;37.
16. Van Acker K., De Buyser L., Celis J.P., Van Houtte P. J. Appl. Cryst. 27:1994;56.
17. Wilson R.G., Stevie F.A., Magee C.W. Secondary Ion Mass Spectrometry. 1989;Wiley, New York.
18. Bunker S.N., Armini A.J. Nucl. Instr. and Meth. B. 56-57:1991;652.
19. Parrat L.G. Phys. Rev. 95:1954;359.
20. I.C. Noyan, J.B. Cohen, in: B. Ilschner, N.J. Grant (Eds.), Residual Stresses, Springer, New York, 1987.
21. Wriedt H.A., Murray J.L. Bull. Alloy Phase Diagrams. 8:1987;378.
22. Levi G., Kaplan W.D., Bamberger M. Mater. Lett. 35:1998;344.
23. Perry A.J., Sue J.A., Martin P.J. Surf. Coat. Technol. 81:1996;17-28.
24. Perry A.J. Thin Solid Films. 193-194:1990;463.
25. Kim J.O., Achenbach J.D., Mirkarimi P.B., Shinn M., Barnett S.A. J. Appl. Phys. 72(5):1992;1805.
26. Chollet L., Perry A.J. Thin Solid Films. 123:1985;223.
27. Fillit R.Y., Perry A.J. Surf. Coat. Technol. 36:1988;647.
28. Bromark M., Larsson M., Hedenqvist P., Hogmark S. Surf. Coat. Technol. 90:1997;217.
29. Predecki P., Zhu X., Ballard B. Adv. X-ray Anal. 36:1993;237.
30. Rafaja D., Valvoda V., Kuzel R., Perry A.J., Treglio J.R. Surf. Coat. Technol. 86-87:1996;302.
31. Perry A.J., Sartwell B.D., Valvoda V., Rafaja D., Williamson D.L., Nelson A.J. J. Vac. Sci. Technol. A. 10(4):1992;1446.
32. Oda K., Nakayama A., Ohara H., Kitagawa N., Nomura T. Nucl. Instr. and Meth. B. 121:1997;283.
33. Brunner J., Perry A.J. Thin Solid Films. 153:1987;103.
34. Ziegler J.F. Handbook of Ion Implantation Technology. 1992;North-Holland, Amsterdam.
35. Mazzone A.M. Phys. Stat. Sol. (a). 95:1986;149.