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Materials Science and Engineering: A

Volumn 253, Issue 1-2, 1998, Pages 310-318

Microstructural changes in ion implanted titanium nitride

(1) Perry, Anthony J a

a AIMS Marketing (United States)

Author keywords

Ion implantation; Long range effect; Residual stress; Titanium nitride

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; DISLOCATIONS (CRYSTALS); ELECTRIC CONDUCTIVITY; ELECTRON TRANSPORT PROPERTIES; ION IMPLANTATION; RESIDUAL STRESSES; X RAY DIFFRACTION ANALYSIS;

IMPLANTATION AFFECTED ZONE; LONG RANGE EFFECT; STRAIN DISTRIBUTION;

TITANIUM NITRIDE;

EID: 0009194329 PISSN: 09215093 EISSN: None Source Type: Journal
DOI: 10.1016/s0921-5093(98)00742-4 Document Type: Article

Times cited : (20)

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