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Volumn 34, Issue 1, 2002, Pages 698-702
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Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation
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Author keywords
Friction; Lubrication; Mechanicochemical reaction; Scanning XPS; TiN film
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Indexed keywords
CHLORINE;
COMPOSITION;
COMPOSITION EFFECTS;
FRICTION;
ION IMPLANTATION;
MICROANALYSIS;
OXIDATION;
SCANNING;
SECONDARY EMISSION;
SPECTROSCOPIC ANALYSIS;
THIN FILMS;
X RAY PHOTOELECTRON SPECTROSCOPY;
FRICTION COEFFICIENT;
MICRO-X RAY PHOTOELECTRON SPECTROSCOPY ANALYSIS;
SECONDARY ELECTRON;
SLIDING TEST;
TITANIUM NITRIDE;
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EID: 0036694128
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/sia.1391 Document Type: Conference Paper |
Times cited : (16)
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References (13)
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