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Volumn 34, Issue 1, 2002, Pages 698-702

Micro-XPS analysis of slide-tested TiN films with/without Cl+ implantation

Author keywords

Friction; Lubrication; Mechanicochemical reaction; Scanning XPS; TiN film

Indexed keywords

CHLORINE; COMPOSITION; COMPOSITION EFFECTS; FRICTION; ION IMPLANTATION; MICROANALYSIS; OXIDATION; SCANNING; SECONDARY EMISSION; SPECTROSCOPIC ANALYSIS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0036694128     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1391     Document Type: Conference Paper
Times cited : (16)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.