The influence of tip performance on scanning probe lithography

Applied Surface Science

Volumn 221, Issue 1-4, 2004, Pages 402-407

  Zhou, Hualan ^a   Li, Zhuang ^a   Wu, Aiguo ^a   Zheng, Jianping ^a   Zhang, Jian ^b   Wu, Shifa ^b  

^a CHANGCHUN INSTITUTE OF APPLIED CHEMISTRY   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Lithography; Nanostructure; Nanotechnology; Scanning probe microscopy

Indexed keywords

ANODIC OXIDATION; ATOMIC FORCE MICROSCOPY; GLASS; GOLD; LITHOGRAPHY; MICROSCOPES; NANOSTRUCTURED MATERIALS; SCANNING TUNNELING MICROSCOPY; SELF ASSEMBLY; SILICON NITRIDE; SUBSTRATES; SURFACE PHENOMENA; SURFACES;

ANODIZATION; SCANNING PROBE LITHOGRAPHY (SPL);

NANOTECHNOLOGY;

EID: 0344308597     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00944-9     Document Type: Article

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