Nanolithography with an atomic force microscope

Superlattices and Microstructures

Volumn 20, Issue 3, 1996, Pages 349-356

  Wendel, M ^a   Irmer, B ^a   Cortes, J ^a   Kaiser, R ^a   Lorenz, H ^a   Kotthaus, J P ^a   Lorke, A ^a   Williams, E ^b  

^a UNIVERSITY OF MUNICH   (Germany)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; ELECTRON BEAMS; ELECTRON MICROSCOPY; FABRICATION; HETEROJUNCTIONS; LITHOGRAPHY; MAGNETORESISTANCE; MASKS; PHOTORESISTS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE;

AMORPHOUS CARBON TIPS; ELECTRON BEAM DEPOSITION; ETCH MASKS; EVAPORATION SHADOW MASKS;

NANOTECHNOLOGY;

EID: 0029726256     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1006/spmi.1996.0088     Document Type: Article

References (12)

1. T. Teuschler, K. Mahr, S. Miyazaki, M. Hundhausen and L. Ley, Appl. Phys. Lett. 66, 2499 (1995); C. R. K. Marrian (Ed), The Technology of Proximal Probe Lithography, SPIE Press, Bellingham, WA, (1993).
2. T. Teuschler, K. Mahr, S. Miyazaki, M. Hundhausen and L. Ley, Appl. Phys. Lett. 66, 2499 (1995); C. R. K. Marrian (Ed), The Technology of Proximal Probe Lithography, SPIE Press, Bellingham, WA, (1993).
3. M. Wendel, S. Kühn, H. Lorenz, J. P. Kotthaus and M. Holland, Appl. Phys. Lett. 65, 1775 (1994).
4. AFM tips from Nanoprobe.
5. M. Wendel, H. Lorenz and J. P. Kotthaus, Appl. Phys. Lett. 67, 3732 (1995).
6. C. Nguyen, B. Brar, H. Koremer and J. English, Appl. Phys. Lett. 60, 2549 (1992).
7. L. L. Sohn, R. L. Willett, Appl. Phys. Lett. 67, 1552 (1995).
8. C. Lettau, M. Wendel, A. Schmeller, W. Hansen, J. P. Kotthaus, W. Klein, G. Böhm, G. Tränkle, G. Weimann and M. Holland, Phys. Rev. B 50, 42432 (1994).
9. A. Lorke, J. P. Kotthaus and K. Ploog, Phys. Rev. B 44, 3447 (1991).
10. D. Weiss, M. L. Roukes, A. Menschig, P. Grambow, K. v. Klitzing and G. Weimann, Phys. Rev. Lett. 66, 2790 (1991).
11. R. Kaiser, M. Wendel, H. Lorenz, T. Schlösser, K. Ensslin, J. P. Kotthaus and A. Lorke, to be published.
12. M. Wendel, H. Lorenz, J. P. Kotthaus and M. Holland, Solid St. Electr. 40, 25 (1996).