Optical detection of the coriolis force on a silicon micromachined gyroscope

Journal of Microelectromechanical Systems

Volumn 12, Issue 5, 2003, Pages 540-549

  Annovazzi Lodi, Valerio ^a   Merlo, Sabina ^a   Norgia, Michele ^a,b   Spinola, Guido ^c   Vigna, Benedetto ^c   Zerbini, Sarah ^c  

^a UNIVERSITY OF PAVIA   (Italy)

^b INFN SEZIONE DI ROMA   (Italy)

^c STMICROELECTRONICS   (Italy)

Author keywords

Mechanical variables measurement; Microelectromechanical system (MEMS); Micromachining; Microsensors; Optical interferometry

Indexed keywords

AUTOMOBILES; INTERFEROMETRY; MECHANICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; NATURAL FREQUENCIES; PRESSURE; ROTATION; SCANNING ELECTRON MICROSCOPY;

AUTOMOTIVE APPLICATIONS; CORIOLIS FORCE; FEEDBACK INTERFEROMETRY; OPTICAL DETECTION; QUALITY FACTOR; SILICON MICROMACHINED GYROSCOPE; VACUUM BELL;

GYROSCOPES;

EID: 0242720781     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.817893     Document Type: Article

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