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"Sensors and Actuators, A: Physical"
Volumn 50, Issue 1-2, 1995, Pages 111-115
A micromachined vibrating gyroscope
Author keywords

Gyroscopes; Micromachining; Q factors
Indexed keywords

CAPACITANCE; ELECTROSTATIC DEVICES; MICROMACHINING; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; RESONATORS; SEMICONDUCTING SILICON; SUBSTRATES;
EID: 0029350972     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)80093-8     Document Type: Article
Times cited : (112)
References (8)
  • 1
    • 85024609333 scopus 로고    scopus 로고
    • S. Fujishima, T. Nakamura and K. Fujimoto, Piezoelectric vibrating gyroscope using flexural vibration of triangular bar, Proc. 45th Ann. Symp. Freq. Control, Los Angeles, CA, USA, 29–31, May, 1991, pp. 261–265
  • 2
    • 85024600582 scopus 로고    scopus 로고
    • P. Greiff, B. Boxenhorn, T. King and L. Niles, Silicon monolithic gyroscope, Tech. Digest, 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 24–28 June, 1991, pp. 966–969
  • 3
    • 85024617865 scopus 로고    scopus 로고
    • K. Maenaka and T. Shiozawa, Silicon rate sensor using anisotropic etching technology, Tech. Digest, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 7–10 June, 1993, pp. 642–645
  • 4
    • 85024632464 scopus 로고    scopus 로고
    • J. Soderkvist, Micromachined gyroscopes, Tech. Digest, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 7–10 June, 1993, pp. 638–641
  • 5
    • 85024608466 scopus 로고    scopus 로고
    • J. Bernstein, S. Cho, A.T. King, A. Kourepenis, P. Maciel and M. Weinberg, A micromachined comb-drive tuning fork rate gyroscope, Digest IEEE/ASME Micro Electro Mechanical Systems (MEMS) Workshop, Fort Lauderdale, FL, USA, Feb. 1993, pp. 143–148
  • 6
    • 85024659887 scopus 로고    scopus 로고
    • M. Hashimoto, C. Cabuz, K. Minami and M. Esashi, Silicon resonant angular rate sensor using electromagnetic excitation and capacitive detection, Tech. Digest, 12th Sensor Symp., Osaka, Japan, 1994, pp. 163–166
  • 7
    • 85024642738 scopus 로고    scopus 로고
    • N. Takeshima, K.J. Gabriel, M. Ozaki, J. Takahashi, H. Horiguchi and H. Fujita, Electrostatic parallelogram actuators, Tech. Digest, 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 24–28 June, 1991, pp. 63–66
  • 8
    • 85024669626 scopus 로고    scopus 로고
    • K. Tanaka, Y. Mochida, M. Sugimoto, K. Moriya, T. Hasegawa, K. Atsuchi and K. Ohwada, A micromachined vibrating gyroscope, Digest, MEMS '95 Workshop (8th IEEE Int. Workshop Micro Electro Mechanical Systems), Amsterdam, 29 Jan.–2 Feb., 1995, pp. 278–281

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.