Polytype dependence of transition metal-related deep levels in 4H-, 6H- And 15R-SiC

Materials Science Forum

Volumn 389-393, Issue 1, 2002, Pages 573-576

  Grillenberger, J ^a   Achtziger, N ^b   Pasold, G ^a   Witthuhn, W ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

Author keywords

Chromium; Deep level; DLTS; Level split; Polytype dependence; Radiotracer; Tantalum; Titanium; Transition metal; Tungsten; Vanadium

Indexed keywords

CRYSTAL LATTICES; DEEP LEVEL TRANSIENT SPECTROSCOPY; ENERGY GAP; SILICON CARBIDE; CHROMIUM; TANTALUM; TITANIUM; TUNGSTEN; VANADIUM;

LATTICE SITES; POLYTYPE DEPENDENCE; RADIOTRACERS; DATA SET; DEEP-LEVEL; DEEP-LEVELS; LEVEL SPLIT; POLYTYPES; RADIOTRACER; SIC POLYTYPES;

TRANSITION METALS;

EID: 0242605637     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.389-393.573     Document Type: Article

References (18)

1. Yu.A. Vodakov, A.D. Roenkov, M.G. Ramm, E.N. Mokhov, and Yu.N. Makarov, phys. stat. sol. (b) 202 (1997), p. 177.
2. D.V. Lang, J. Appl. Phys. 45 (1974), p. 3023.
3. N. Achtziger and W. Witthuhn, Phys. Rev. B 57 (1998), p. 12181.
4. N. Achtziger, J. Grillenberger, W. Witthuhn, Mat. Sci. For. Vols. 264-268 (1998), p. 541.
5. J. Grillenberger, N. Achtziger, R. Sielemann, W. Witthuhn, J.Appl.Phys. 88 (2000), p. 3260.
6. J. Grillenberger, G. Pasold, W. Witthuhn, N. Achtziger, Appl. Phys. Lett. 79 (2001), p. 2405.
7. J. Grillenberger, PhD Thesis 2000.
8. N. Achtziger, G. Pasold, R. Sielemann, C. Hülsen, J. Grillenberger, and W. Witthuhn Phys. Rev. B 62 (2000), p. 12888.
9. G.Pasold, N.Achtziger,J.Grillenberger,W.Witthuhn, Mat.Sci.For. Vols. 353-356 (2001), p. 471.
10. H. Overhof, University of Paderborn, private communication.
11. N.Achtziger, H.Gottschalk, T.Licht, J.Meier and M.Rüb, U.Reislöhner and W.Witthuhn, Appl. Phys. Lett. 66 (1995), p. 2370.
12. P.Blood and J.W.Orton, (Academic Press, London, 1992), p.344 and p. 426.
13. V.V. Afanas'ev, M. Bassler, G. Pensl, M.J. Schulz, and E. Stein von Kamienski, J. Appl. Phys. 79 (1996), p. 3108.
14. T.Dalibor, G.Pensl, N.Nordell, and A.Schöner, Phys.Rev. B 55 (1997), p. 13618.
15. P. Käckell, B. Wenzien, F. Bechstedt, Phys. Rev. B 50 (1994), p. 10761.
16. V.A.Il'in and V.A.Ballandovich, Defect and Diffusion Forum, Vols. 103-105 (1992), p. 633.
17. J.M.Langer and H.Heinrich, Phys.Rev.Lett. 55 (1997), p. 1414.
18. W. Kohn and J.M. Luttinger, Phy. Rev. 98 (1955), p. 915.