Micromachined Self-Aligned Microlens(SAM) for microcolumn electron beam

Microelectronic Engineering

Volumn 35, Issue 1-4, 1997, Pages 413-416

  Lee, Yong Jae ^a   Kang, Seok Ho ^a   Chun, Kukjin ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTRONS; ETCHING; LENSES; OPTICAL MICROSCOPY; SILICON WAFERS; THREE DIMENSIONAL;

ANISOTROPIC ETCHING; ANODIC BONDING; MICROCOLUMN ELECTRON BEAM LITHOGRAPHY; SELF ALIGNED MICROLENS;

ELECTRON BEAM LITHOGRAPHY;

EID: 0031071158     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(96)00144-X     Document Type: Article

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