Micromachined single-crystal silicon electron lenses

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2713-2717

  Hofmann, Wolfgang ^a   MacDonald, Noel C ^a  

^a Cornell University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040086918     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589713     Document Type: Article

References (16)

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