Laser detection of radiation enhanced electron transport in ultra-thin oxides

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 514, Issue 1-3, 2003, Pages 150-155

  Pasternak, R ^a   Shirokaya, Y V ^a   Marka, Z ^a   Miller, J K ^a   Rashkeev, S N ^a   Pantelides, S T ^a   Tolk, N H ^a   Choi, B K ^b   Schrimpf, R D ^b   Fleetwood, D M ^b  

^a VANDERBILT UNIVERSITY   (United States)

^b VANDERBILT UNIVERSITY   (United States)

Author keywords

2 nd harmonic generation; Induced leakage current; Silicon; Thin gate oxides

Indexed keywords

ELECTRONS; LEAKAGE CURRENTS; PULSED LASER APPLICATIONS; SECOND HARMONIC GENERATION; SILICON; X RAY ANALYSIS;

LASER DETECTION;

NUCLEAR INSTRUMENTATION;

EID: 0242523048     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2003.08.098     Document Type: Conference Paper

References (15)

1. McGilp J.F. J. Phys. D: Appl. Phys. 29:1996;1812.
2. Scarpa A., Paccagnella A., Montera F., Ghibaudo G., Pananakakis G., Ghidini G., Fuochi P.G. IEEE Trans. Nucl. Sci. NS-44:1997;1818.
3. Ceschia M., Paccagnella A., Cester A., Scarpa A., Ghidini G. IEEE Trans. Nucl. Sci. NS-45:1998;2375.
4. Larcher L., Paccagnella A., Ceschia M., Ghidini G. IEEE Trans. Nucl. Sci. NS-46:1999;1553.
5. Bloch J., Mihaychuk J.G., van Driel H.M. Phys. Rev. Lett. 77:1996;920.
6. Ghandhi S.K. VLSI Fabrication Principles. 1994;Wiley, New York.
7. Campbell S.A. The Science and Engineering of Microelectronic Fabrication. 2001;Oxford University Press, New York.
8. Takahashi Y., Ohnishi K., Fujimaki T., Yoshikawa M., Page M. IEEE Trans. Nucl. Sci. NS-46:1999;1578.
9. Dadap J.I., Wilson P.T., Anderson H.M., Downer M.C. Opt. Lett. 22:1997;901.
10. Marka Z., Singh S.K., Wang W., Lee S.C., Kavich J., Glebov B., Rashkeev S.N., Karmarkar A.P., Albridge R.G., Pantelides S.T., Schrimpf R.D., Fleetwood D.M., Tolk N.H. IEEE Trans. Nucl. Sci. NS-47:2000;2256.
11. Marka Z., Pasternak R., Albridge R.G., Rashkeev S.N., Pantelides S.T., Tolk N.H., Choi B.K., Fleetwood D.M., Schrimpf R.D. J. Appl. Phys. 93(4):2003;15.
12. Green M.L., Gusev E.P., Degraeve R., Garfunkel E.L. J. Appl. Phys. 90:2001;2057.
13. Lenahan P.M., Campbell J.P., Kang A.Y., Liu S.T., Weimer R.A. IEEE Trans. Nucl. Sci. NS-48:2001;2101.
14. Blöchl P.E., Stathis J.H. Phys. Rev. Lett. 83:1999;372.
15. Riess P., Ceschia M., Paccagnella A., Ghibaudo G., Pananakakis G. Appl. Phys. Lett. 76:2000;1158.