High-density Microwave Plasma-Enhanced Chemical Vapor Deposition of Crystalline Silicon Films for Solar Cell Devices

Solid State Phenomena

Volumn 93, Issue , 2003, Pages 109-114

  Shirai, Hajime ^a   Ohkawara, Go ^a   Nakajima, Masanobu ^a  

^a SAITAMA UNIVERSITY   (Japan)

Author keywords

High Rate Deposition; Microcrystalline Silicon; Microwave Plasma; Solar Cell

Indexed keywords

CRYSTALLINE MATERIALS; GLASS; MICROSTRUCTURE; MICROWAVES; PHOTOVOLTAIC EFFECTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUARTZ; SILICON;

PLASMA STATE;

SOLAR CELLS;

EID: 0242413997     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.93.109     Document Type: Conference Paper

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