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Volumn 420, Issue , 1996, Pages 3-14
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On the way towards high efficiency thin film silicon solar cells by the 'micromorph' concept
a a a a a a a a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
BORON;
DOPING (ADDITIVES);
GLOW DISCHARGES;
HYDROGENATION;
PERFORMANCE;
PLASMA APPLICATIONS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
THIN FILMS;
TRANSPORT PROPERTIES;
COMPENSATION TECHNIQUES;
MICROMORPH CELLS;
THIN FILM SILICON SOLAR CELLS;
VERY HIGH FREQUENCY GLOW DISCHARGE;
SILICON SOLAR CELLS;
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EID: 0030396396
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-420-3 Document Type: Conference Paper |
Times cited : (244)
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References (37)
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