Underwater and water-assisted laser processing: Part 1 - General features, steam cleaning and shock processing

Optics and Lasers in Engineering

Volumn 41, Issue 2, 2004, Pages 307-327

  Kruusing, Arvi ^a,b  

^a TALLINN UNIVERSITY OF TECHNOLOGY   (Estonia)

^b UNIVERSITY OF OULU   (Finland)

Author keywords

Laser cleaning; Laser processing; Laser shock processing; Optical properties of water; Review

Indexed keywords

AGENTS; DEBRIS; LASER APPLICATIONS; LIGHT TRANSMISSION; WATER;

LASER SHOCK PROCESSING;

LASER OPTICS;

EID: 0141988564     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(02)00142-2     Document Type: Review

References (112)

1. Mosbacher M., Münzer H.J., Zimmermann J., Solis J., Boneberg J., Leiderer P. Optical field enhancement effects in laser-assisted particle removal. Appl Phys A. 72:2001;41-44.
2. Mosbacher M., Chaoui N., Siegel J., Dobler V., Solis J., Boneberg J., Afonso C.N., Leiderer P. A comparison of ns and ps steam laser cleaning of Si surfaces. Appl Phys A. 69(Suppl):1999;S331-S334.
3. Konagai C., Sano Y., Aoki N. Underwater direct metal processing by high-power copper vapour laser. Little C.E., Sabotinov N.V. Pulsed metal vapour lasers. 1996;371-376 Kluwer Academic Publishers, Dordrecht.
4. Shafeev G.A., Simakhin A.V. Spatially confined laser-induced damage of Si under a liquid layer. Appl Phys A. 54:1992;311-316.
5. Forget P, Strudel JL, Jeandin M. Laser shock surface treatment of Ni-based superalloys. Materials Manufacturing Proceedings vol. 5, No. 4. NY: Marcel Dekker, Inc., 1990. p. 501-28.
6. Banaś G., Elsayed-Ali H.E., Lawrence F.V. Jr., Rigsbee J.M. Laser shock-induced mechanical and microstructural modification of welded marging steel. J Appl Phys. 67(5):1990;2380-2384.
7. Sowers B.L., Birkhoff R.D., Arakawa E.T. Optical absorption of liquid water in the vacuum ultraviolet. J Chem Phys. 57(1):1972;583-584.
8. Hale G.M., Querry M.R. Optical constants of water in the 200-nm to 200-. μm wavelength region Appl Opt. 12(3):1973;555-563.
9. Laser specification tables. Laser focus world, Supplement (Buyers Guide 2001), 2000; 36(12):66-286.
10. Mittal KL, editor. Particles on surfaces 1. Detection, adhesion, and removal. New York and London: Plenum Press, 1988.
11. Hattori T. Contamination control: Problems and prospects. Solid State Technol. 33(7):1990;S1-S8.
12. Tam A.C., Leung W.P., Zapka W., Ziemlich W. Laser-cleaning techniques for removal of surface particulates. J Appl Phys. 71(7):1992;3515-3523.
13. Allen S.D., Miller A.S., Lee S.J. Laser assisted particle removal 'dry' cleaning of critical surfaces. Mater Sci Eng. B49:1997;85-88.
14. International Technology Roadmap for Semiconductors 2000 Update. Overall Roadmap Technology Characteristics. www.itrs.net/ntrs/publnrst.nstorwww.sematech.org.
15. Lu Y.F., Song W.D., Hong M.H., Teo B.S., Chong T.C., Low T.S. Laser removal of particles from magnetic head sliders. J Appl Phys. 80(1):1996;499-504.
16. Menon VB, Michaels LD, Donovan RP, Ensor DS. Effects of particulate size, composition, and medium on silicon wafer cleaning. Solid State Technol 1989 32 (3) p. S7-12.
17. Park H.K., Grigoropoulos C.P., Leung W.P., Tam A.C. A practical excimer laser-based cleaning tool for removal of surface contaminants. IEEE Trans Comp Packag Manufact Technol Part A. 17(4):1994;631-643.
18. Lizotte T.E., O'Keeffe T.R. Chemical free cleaning using excimer lasers. Proc SPIE. 2703:1996;279-287.
19. Meunier M, Wu X, Beaudoin F, Sacher E, Simard-Normandin M. Excimer laser cleaning for microelectronics: modeling, applications and challenges. (Laser Applications in Microelectronic and Optoelectronic Manufacturing IV. 25-27 Jan. 1999; San Jose, CA, USA). Proc SPIE 1999;3618:290-301.
20. Bowling R.A. An analysis of particle adhesion on semiconductor surfaces. J Electrochem Soc Solid-State Sci Technol. 132(9):1985;2208-2214.
21. Ranade M.B. Adhesion and removal of fine particles on surfaces. Aerosol Sci Technol. 7:1987;161-176.
22. Wu X., Sacher E., Meunier M. The effects of hydrogen bonds on the adhesion of inorganic oxide particles on hydrophilic silicon surfaces. J Appl Phys. 86(3):1999;1744-1748.
23. Kim S., Lawrence C.J. Suspension mechanics for particle contamination control. Chem Eng Sci. 43(5):1988;991-1016.
24. Imen K., Lee S.J., Allen S.D. Laser-assisted micron scale particle removal. Appl Phys Lett. 58(2):1991;203-205.
25. Mosbacher M., Dobler V., Boneberg J., Leiderer P. Universal threshold for the steam laser cleaning of submicron spherical particles from silicon. Appl Phys A. 70:2000;669-672.
26. Dobler V., Oltra R., Boquillon J.P., Mosbacher M., Boneberg J., Leiderer P. Surface acceleration during dry laser cleaning of silicon. Appl Phys A. 69(Suppl):1999;S335-S337.
27. Lu Y.F., Zheng Y.W., Song W.D. Laser induced removal of spherical particles from silicon wafers. J Appl Phys. 87(3):2000;1534-1539.
28. Lu Y.F., Song W.D., Zhang Y., Hong M.H., Chong T.C. Laser removal of particles from solid surfaces. RIKEN Rev no. 32:2001;64-70.
29. Tam A.C., Zapka W., Ziemlich W. Efficient laser cleaning of small particulates using pulsed laser irradiation synchronized with liquid-film deposition. Proc SPIE. 1598:1991;13-18.
30. Lee S.J., Imen K., Allen S.D. Threshold measurements in laser assisted particle removal. Proc SPIE. 1598:1991;2-12.
31. Zapka W., Ziemlich W., Tam A.C. Efficient pulsed laser removal of. 0.2 μm sized particles from a solid surface Appl Phys Lett. 58(20):1991;2217-2219.
32. Zapka W., Tam A.C., Ayers G., Ziemlich W. Liquid film enhanced laser cleaning. Microelectron Eng. 17:1992;473-478.
33. 2 laser assisted particle removal threshold measurements Appl Phys Lett. 61(19):1992;2314-2316.
34. Zapka W., Ziemlich W., Leung W.P., Tam A.C. Laser cleaning removes particles from surfaces. Microelectron Eng. 20:1993;171-183.
35. Lee S.J., Imen K., Allen S.D. Laser-assisted particle removal from silicon surfaces. Microelectron Eng. 20:1993;145-157.
36. Leiderer P., Boneberg J., Mosbacher M., Schilling A., Yavas O. Laser cleaning of silicon surfaces. Proc SPIE. 3274:1998;68-78.
37. Tam A.C., Park H.K., Grigoropoulos C.P. Laser cleaning of surface contaminants. Appl Surf Sci. 127-129:1998;721-725.
38. She M., Kim D., Grigoropoulos C.P. Liquid-assisted pulsed laser cleaning using near-infrared and ultraviolet radiation. J Appl Phys. 86(11):1999;6519-6524.
39. Vereecke G., Röhr E., Heyns M.M. Evaluation of a dry laser cleaning process for the removal of surface particles. Solid State Phenom. 65-66:1999;187-190.
40. Vereecke G., Röhr E., Heyns M.M. Laser-assisted removal of particles on silicon wafers. J Appl Phys. 85(7):1999;3837-3843.
41. Lee J.M., Watkins K.G., Steen W.M. Angular laser cleaning for effective removal of particles from a solid surface. Appl Phys A. 71:2000;671-674.
42. Halfpenny D.R., Kane D.M. A quantitative analysis of single pulse ultraviolet dry laser cleaning. J Appl Phys. 86(12):1999;6641-6646.
43. 2 laser cleaning of hydrophilic oxidized silicon surfaces Mater Res Soc Symp Proc. 397:1996;497-502.
44. 2 laser-assisted removal of submicron particles from solid surfaces J Appl Phys. 79(6):1996;2857-2862.
45. Fourrier T., Schrems G., Mühlberger T., Heitz J., Arnold N., Bäuerle D., Mosbacher M., Boneberg J., Leiderer P. Laser cleaning of polymer surfaces. Appl Phys A. 72:2001;1-6.
46. Leung P.T., Do N., Klees L., Leung W.P., Tong F. Transmission studies of explosive vaporization of a transparent liquid film on a opaque solid surface induced by excimer-laser-pulsed irradiation. J Appl Phys. 72(6):1992;2256-2263.
47. Lee S.J., Imen K., Allen S.D. Shock wave analysis of laser assisted particle removal. J Appl Phys. 74(12):1993;7044-7047.
48. Lu Y.F., Song W.D., Zhang Y., Low T.S. Theoretical model and experimental study for dry and steam laser cleaning. Proc SPIE. 3550:1998;7-18.
49. Lu Y.F., Zhang Y., Song W.D., Low T.S. A theoretical model for steam laser cleaning. Mater Res Soc Symp Proc. 526:1998;409-414.
50. Lu Y.F., Zhang Y., Song W.D., Chan D.S.H. A theoretical model for laser cleaning of microparticles in a thin liquid layer. Jpn J Appl Phys. 37:1998;L1330-L1332.
51. Lu Y.F., Zhang Y., Wan Y.H., Song W.D. Laser cleaning of silicon surface with deposition of different liquid films. Appl Surf Sci. 138-139:1999;140-144.
52. Lu Y.F., Song W.D., Zhang Y., Zheng Y.W. Laser surface cleaning of electronic materials. Proc SPIE. 3618:1999;278-289.
53. Wu X., Sacher E., Meunier M. The modeling of excimer laser particle removal from hydrophilic silicon surfaces. J Appl Phys. 87(8):2000;3618-3627.
54. Lu Y.F., Song W.D., Hong M.H., Ren Z.M., Zheng Y.W. Laser surface cleaning - Basic understanding, engineering efforts and technical barriers. Proc SPIE. 4088:2000;371-379.
55. Zapka W., Ziemlich W., Leung W.P., Tam A.C. Laser cleaning. Laser-induced removal of particles from surfaces Adv Mater Opt Electron. 2:1993;63-70.
56. Yavas O., Leiderer P., Park H.K., Grigoropoulos C., Poon C.C., Leung W.P., Do N., Tam A.C. Optical reflectance and scattering studies of nucleation and growth of bubbles at a liquid-solid interface induced by pulsed laser heating. Phys Rev Lett. 70(12):1993;1830-1833.
57. Yavas O., Leiderer P., Park H.K., Grigoropoulos C., Poon C.C., Leung W.P., Do N., Tam A.C. Optical and acoustic study of nucleation and growth of bubbles at a liquid-solid interface induced by nanosecond-pulsed-laser heating. Appl Phys A. 58:1994;407-415.
58. Yavas O., Leiderer P., Park H.K., Grigoropoulos C., Poon C.C., Tam A.C. Enhanced acoustic cavitation following laser-induced bubble formation. long-term memory effect Phys Rev Lett. 72(13):1994;2021-2024.
59. Yavas O., Schilling A., Bischof J., Boneberg J., Leiderer P. Bubble nucleation and pressure generation during laser cleaning of surfaces. Appl Phys A. 64:1997;331-339.
60. Park H.K., Zhang X., Grigoropoulos C.P., Poon C.C., Tam A.C. Transient temperature during the vaporization of liquid on a pulsed laser-heated solid surface. Trans ASME. 118:1996;702-708.
61. Park H.K., Kim D., Grigoropoulos C.P., Tam A.C. Pressure generation and measurement in the rapid vaporization of water on a pulsed-laser-heated surface. J Appl Phys. 80(7):1996;4072-4081.
62. Park H.K., Grigoropoulos C.P., Poon C.C., Tam A.C. Optical probing of the temperature transients during pulsed-laser induced boiling of liquids. Appl Phys Lett. 68(5):1996;596-598.
63. Do N., Klees L., Tam A.C., Leung P.T., Leung W.P. Photodeflection probing of the explosion of a liquid film in contact with a solid heated by pulsed excimer laser irradiation. J Appl Phys. 74(3):1993;1534-1538.
64. Lee J.M., Watkins K.G. In-process monitoring techniques for laser cleaning. Opt Lasers Eng. 34:2000;429-442.
65. Peyre P., Scherpereel X., Berthe L., Fabbro R. Current trends in laser shock processing. Surf Eng. 14(5):1998;377-380.
66. Sano Y, Mukai N, Aoki N, Konagai C. Laser processing to improve residual stress of metal components. IEEE/LEOS 1996 Summer Topical Meetings: Advanced Applications of Lasers in Materials Processing/Broadband Optical Networks/Smart Pixels/Optical MEMs and their Applications, 5-6 Aug. 1996. New York: IEEE, 1996. p. 30-1.
67. Devaux D., Tollier L., Bartnicki E. Generation of shock waves by laser-induced plasma in confined geometry. J Appl Phys. 74(4):1993;2268-2273.
68. Sano Y., Mukai N., Okazaki K., Obata M. Residual stress improvement in metal surface by underwater laser irradiation. Nucl Instrum Methods Phys Res B. 121:1997;432-436.
69. Forget P., Jeandin M. Déformation à l'échelle cristallographique d'alliages à base de nickel mono- et polycristallins par choc laser en mode confiné J Phys III France. 5(8):1995;1133-1144.
70. Zhang Y.K., Hu C.L., Cai L., Yang J.C., Zhang X.R. Mechanism of improvement on fatique life of metal by laser-excited shock waves. Appl Phys A. 72:2001;113-116.
71. Fairand B.P., Wilcox B.A., Gallagher W.J., Williams D.N. Laser shock-induced microstructural and mechanical property changes in 7075 alumnium. J Appl Phys. 43(9):1972;3893-3895.
72. Sano Y, Kimura M, Mukai N, Yoda M, Obata M, Ogisu T. Process and applications of shock compression by nano-second pulses of frequency-doubled Nd:YAG laser (High-Power Lasers in Manufacturing. 1-5 Nov. 1999; Osaka, Japan). Proc SPIE 2000;3888:294-306.
73. Fabbro R., Peyre P., Berthe L., Scherpereel X. Physics and applications of laser-shock processing. J Lasers Appl. 10(6):1998;265-279.
74. Fabbro R., Fournier J., Ballard P., Devaux D., Virmont J. Physical study of laser-produced plasma in confined geometry. J Appl Phys. 68(2):1990;775-784.
75. Hammersley G., Hackel L.A., Harris F. Surface prestressing to improve fatique strength of components by laser shot peening. Optics Lasers Eng. 34:2000;327-337.
76. Peyre P., Fabbro R., Merrien P., Lieurade H.P. Laser shock processing of aluminium alloys. Application to high cycle fatique behaviour. Mater Sci Eng A. 210(1-2):1996;102-113.
77. Peyre P, Berthe L, Fabbro R, Scherpereel X, Bartnicki E. Laser shock processing of materials: characterization and application of the process. (Lasers in Material Processing. 16-20 June 1997; Munich, Germany). Proc SPIE 1997;3097:558-69.
78. Peyre P., Berthe L., Scherpereel X., Fabbro R. Laser-shock processing of aluminium-coated 55C1 steel in water-confinement regime, characterization and application to high-cycle fatique behaviour. J Mater Sci. 33(6):1998;1421-1429.
79. Fox J.A. Effect of water and paint coatings on laser-irradiated targets. Appl Phys Lett. 24(10):1974;461-464.
80. Scherpereel X., Peyre P., Fabbro R., Lederer G., Celati N. Modifications of mechanical and electrochemical properties of stainless steels surfaces by laser shock processing. Proc SPIE. 3097:1997;546-557.
81. Fairand B.P., Clauer A.H. Effect of water and paint coatings on the magnitude of laser-generated shocks. Optics Commun. 18(4):1976;588-591.
82. Fairand B.P., Clauer A.H. Laser generation of high-amplitude stress waves in materials. J Appl Phys. 50(3):1979;1497-1502.
83. Griffin R.D., Justus B.L., Campillo A.J., Goldberg L.S. Interferometric studies of the pressure of a confined laser-heated plasma. J Appl Phys. 59(6):1986;1968-1971.
84. Berthe L., Fabbro R., Peyre P., Tollier L., Bartnicki E. Laser shock processing of materials. study of laser induced breakdown in water confinement regime Proc SPIE. 2789:1996;246-253.
85. Berthe L., Fabbro R., Peyre P., Bartnicki E. Laser shock processing of materials. experimental study of breakdown plasma effects at the surface of confined water Proc SPIE. 3097:1997;570-575.
86. Berthe L., Fabbro R., Peyre P., Tollier L., Bartnicki E. Shock waves from a water-confined laser-generated plasma. J Appl Phys. 82(6):1997;2826-2832.
87. Berthe L, Fabbro R, Peyre P, Bartnicki E, Sollier A. Study of physical processes involved in laser shock processing of materials. ICALEO'98: Proceedings of the Laser Materials Processing Conference, 1998, Orlando, FL, USA. Laser Institute of America, 1998. p. D121-9.
88. Berthe L., Fabbro R., Peyre P., Bartnicki E. Experimental study of the transmission of breakdown plasma generated during laser shock processing. Eur Phys J Appl Phys. 3(2):1998;215-218.
89. Berthe L., Fabbro R., Peyre P., Bartnicki E. Wavelength dependent of laser shock-wave generation in the water-confinement regime. J Appl Phys. 85(11):1999;7552-7555.
90. Berthe L., Sollier A., Peyre P., Fabbro R., Bartnicki E. The generation of laser shock waves in a water-confinement regime with. 50 ns and 150 ns XeCl excimer laser pulses J Phys D. 33:2000;2142-2145.
91. Peyre P., Berthe L., Fabbro R., Sollier A. Experimental determination by PVDF and EMV techniques of shock amplitudes induced by 0.3-. 3 ns laser pulses in a confined regime with water J Phys D. 33:2000;498-503.
92. Peyre P., Fabbro R., Berthe L., Scherpereel X., Bartnicki E. Laser shock processing of materials and related measurements. Proc SPIE. 3343:1998;183-193.
93. Peyre P., Berthe L., Scherpereel X., Fabbro R., Bartnicki E. Experimental study of laser-driven shock waves in stainless steels. J Appl Phys. 84(11):1998;5985-5992.
94. Fairand B.P., Clauer A.H., Jung R.G., Wilcox B.A. Quantitative assessment of laser-induced stress waves generated at confined surfaces. Appl Phys Lett. 25(8):1974;431-433.
95. Tollier L., Fabbro R., Bartnicki E. Study of the laser-driven spallation process by the velocity interferometer system for any reflector interferometry technique. I. Laser-shock characterization. J Appl Phys. 83(3):1998;1224-1230.
96. Ballard P. Contraintes résiduelles induites par impact rapide: application au choc-laser. Th. doct., École polytechnique, France, 1991. 217pp.
97. 2 continus et de laser impulsionnel, Th. doct., Universite Paris Sud XI. Section Sciences. Orsay, Essonne, France, 1993, 223pp.
98. Ballard P., Fournier J., Fabbro R., Frelat J. Residual stresses induced by laser-shocks. J Phys IV (Coll.). 1(C3):1991;487-494.
99. Peyre P., Fabbro R. Laser shock processing. a review of the physics and applications Opt Quantum Electron. 27(12):1995;1213-1229.
100. Cottet F., Marty L., Hallouin M., Romain J.P., Virmont J., Fabbro R., Faral B. Two-dimensional study of shock breakout at the rear face of laser-irradiated metallic targets. J Appl Phys. 64(9):1988;4474-4477.
101. Sano Y., Yoda M., Mukai N., Obata M., Kanno M., Shima S. Residual stress improvement mechanism on metal material by underwater laser irradiation. Nihon Genshiryoku Gakkaishi. J Atomic Energy Soc Japan. 42(6):2000;93-99.
102. Dubrujeaud B., Fontes A., Forget P., Papaphilippou C., Sainte-Catherine C., Vardavoulias M., Jeandin M. Surface modification using high-power lasers. influence of surface characteristics on properties of laser processed materials Surf Eng. 13(6):1997;461-470.
103. Coffey C.S. A model for dislocation sources in a shock or impact environment. J Appl Phys. 62(7):1987;2727-2732.
104. Peyre P, Fabbro R, Berthe L. Laser shock processing to improve mechanical properties of metallic materials. Surface treatment. Computer methods and experimental measurements. Southampton, UK: Comput. Mech. Publications, 1997; 417pp, p. 267-76.
105. Zagouri D., Romain J.-.P., Dubrujeaud B., Jeandin M. Laser shock compaction of porous materials. J Phys IV. 1(C7):1991;47-50.
106. Zagouri D., Romain J.-.P., Dubrujeaud B., Jeandin M. Densification superficielle de matériaux poreux par choc laser. J Phys IV. 1(C3):1991;495-502.
107. Dubrujeaud B, Vardavoulias M, Jeandin M, Zagouri D, Romain JP. Laser shock processing for superficial densification of P/M materials. Advances in powder metallurgy & particulate materials, vol. 4. Princeton, NJ: Metal Powder Industries Federation, MPIF, 1992. p. 67-76.
108. Dubrujeaud B., Vardavoulias M., Jeandin M. Laser shock surface densification of a sintered ferrous alloy. Lasers Eng. 3:1994;29-42.
109. Dubrujeaud B., Vardavoulias M., Jeandin M. Dry sliding wear behaviour of a P/M ferrous alloy superficially densified by laser shock processing. Surf Coat Technol. 67(1-2):1994;125-132.
110. Dubrujeaud B., Jeandin M. Cladding by laser shock processing. J Mater Sci Lett. 13(11):1994;773-775.
111. Ageev V.A. Study of the light erosion of metals in liquids. Zh Prikl Spektrosk. 23(1):1975;42-46.
112. O'Keefe J.D., Skeen C.H., York C.M. Laser-induced deformation modes in thin metal targets. J Appl Phys. 44(10):1973;4622-4626.