CO2 laser cleaning of hydrophilic oxidized silicon surfaces

Materials Research Society Symposium - Proceedings

Volumn 397, Issue , 1996, Pages 497-502

  Boughaba, S ^a   Sacher, E ^a   Meunier, M ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CARBON DIOXIDE LASERS; CLEANING; IMPURITIES; IRRADIATION; LASER BEAMS; PARTICLES (PARTICULATE MATTER); REMOVAL; SILICA; SURFACES; VAPORIZATION; WATER;

HYDROPHILIC OXIDIZED SILICON; LASER CLEANING; POLYSTYRENE LATEX; ZETA POTENTIALS;

SEMICONDUCTING SILICON;

EID: 0029748250     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (24)