Imprint in ferroelectric Pb(Zr,Ti)O3 thin films with thin SrRuO3 layers at the electrodes

Integrated Ferroelectrics

Volumn 37, Issue 1-4, 2001, Pages 205-214

  Grossmann, M ^a   Lohse, O ^a   Schneller, T ^a   Bolten, D ^a   Boettger, U ^a   Contreras, J Rodríguez ^b   Kohlstedt, H ^b   Waser, R ^a,b  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Ferroelectric thin films; Imprint; Pb(Zr,Ti)O3; PZT

Indexed keywords

ELECTRODES; FERROELECTRIC MATERIALS; HEAVY METALS; LITHOGRAPHY; PLATINUM COMPOUNDS; SCREENING;

BULK SCREENING; IMPRINT SCENARIO; INTERFACE SCREENING;

THIN FILMS;

EID: 0141884843     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580108015679     Document Type: Conference Paper

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