Depth-selective 2D-ACAR studies on low-k dielectric thin films

Radiation Physics and Chemistry

Volumn 68, Issue 3-4, 2003, Pages 357-362

  Eijt, S W H ^a   Van Veen, A ^a   Falub, C V ^a   Escobar Galindo, R ^a   Schut, H ^a   Mijnarends, P E ^a   De Theije, F K ^b   Balkenende, A R ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

2D ACAR; Depth profiling; Effusion; Mesoporous film; Non thermal positronium; Percolation

Indexed keywords

CORRELATION METHODS; DIELECTRIC FILMS; KINETIC ENERGY; MESOPOROUS MATERIALS; MONTE CARLO METHODS;

CLASSICAL COLLISIONS;

THIN FILMS;

SILICON DIOXIDE;

CONFERENCE PAPER; CORRELATION ANALYSIS; DIELECTRIC CONSTANT; FILM; KINETICS; MONTE CARLO METHOD; POROSITY; POSITRONIUM; RADIATION SCATTERING;

EID: 0141832620     PISSN: 0969806X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0969-806X(03)00184-1     Document Type: Conference Paper

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