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Volumn 363-365, Issue , 2001, Pages 561-563

Depth-selective 2D-ACAR with POSH: Application to nanocavities generated by ion implantation

Author keywords

2D ACAR; Ion implantation; Nanocavities; Positronium; Si; Slow position beam

Indexed keywords

HELIUM; ION IMPLANTATION; IRRADIATION; NANOSTRUCTURED MATERIALS; SILICON; SURFACE TREATMENT;

EID: 0035010827     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.363-365.561     Document Type: Conference Paper
Times cited : (10)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.