Application of phase-retrieval x-ray diffractometry to carbon doped SiGe(C)/Si(C) superlattice structures

Journal of Applied Physics

Volumn 94, Issue 2, 2003, Pages 1007-1012

  Siu, Karen K W ^a   Nikulin, Andrei Y ^a   Zaumseil, Peter ^b   Yamazaki, Hiroshi ^c   Ishikawa, Tetsuya ^d  

^a MONASH UNIVERSITY   (Australia)

^b IHP   (Germany)

^c Institute of Physical and Chemical Research   (Japan)

^d RIKEN/SPring 8 ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CRYSTAL STRUCTURE; DIFFRACTION; DIFFRACTOMETERS; DOPING (ADDITIVES); INTERDIFFUSION (SOLIDS); RELAXATION PROCESSES; SEMICONDUCTING SILICON COMPOUNDS; SINGLE CRYSTALS; STRAIN; X RAY ANALYSIS;

PHASE-RETRIEVAL;

SUPERLATTICES;

EID: 0043269765     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1586970     Document Type: Article

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