Silicon-Based Heterostructures: Strained-Layer Growth by Molecular Beam Epitaxy

Crystal Research and Technology

Volumn 34, Issue 5, 1999, Pages 583-595

  Herman, M A ^a,b  

^a INSTITUTE OF VACUUM TECHNOLOGY   (Poland)

^b INSTITUTE OF PHYSICS   (Poland)

Author keywords

SiGe Si thin films; Silicon based heterostructures; Strained layer MBE

Indexed keywords

EID: 0042059297     PISSN: 02321300     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-4079(199906)34:5/6<583::AID-CRAT583>3.0.CO;2-X     Document Type: Article

References (24)

1. COPEL, M., REUTER, M.C., KAXIRAS, E., TROMP, R.M.: Phys. Rev. Lett. 63 (1989) 632
2. HERMAN, M.A.: Opto-Electron. Rev. 4 (1996) 77
3. HERMAN, M.A.: SPIE Proceedings Volume 2373 (1995) 11
4. HERMAN, M.A., SITTER, H.: Molecular Beam Epitaxy - Fundamentals and Current Status. 2nd ed., Springer, Berlin, Heidelberg, 1996
5. ISMAIL, K., MEYERSON, B.S.: J. Mater. Sci.: Materials in Electronics 6 (1995) 306
6. JAIN, S.C.: Germanium - Silicon Strained Layers and Heterostructures, Academic Press, Boston, San Diego, 1994
7. JAIN, S.C., OSTEN, H.J., DIETRICH, B., RÜCKER, H.: Semicond. Sci. Technol. 10 (1995) 1289
8. KASPKR, E., HERZOG, H.J., KIBBEL, H.: Appl. Phys. 8 (1975) 199
9. KASPER, E., PARKER, E.H.C. (eds.): Silicon Molecular Beam Epitaxy 1995, J. Cryst. Growth 157 (1995) nos. 1-4
10. KASPER, E., SCHEFFLER, F.: Group IV Compounds, in Semiconductors and Semimetals, WILLARDSON, R.K., BEER, A.C. (eds.) 33 (1991) chapt. 4
11. KASPER, E., SCHÜH, A., BAUER, G., HOLLNDER, B., KIBBEL, H.: J. Cryst. Growth 157 (1995) 68
12. LE GOUSES, F.K., COPEL, M., TROMP, R.M.: Phys. Rev. B 42 (1990) 11690
13. OSTEN, H.J., DIETRICE, B., RÜCKER, H., METHFESSEL, M.: J. Cryst. Growth 150 (1995) 931
14. OSTEN, H.J., KLATT, J., LIPPERT, G., BUGIEL, E.: J. Cryst. Growth 127 (1993a) 396
15. OSTEN, H.J., KLATT, J., LIPPERT, G., BUGIEL, E., HIGUCHI, S.: J. Appl. Phys. 74 (1993b) 2507
16. OSTEN, H.J., LIPPERT, G., KLATT, J.: J. Vac. Sci. Technol. B 10 (1992) 1151
17. PEERCY, P.S.: Strained-layer superlattices, in Concise Encyclopedia of Semiconducting Materials and Related Technologies, MAKAJAH, S., KIMERLING, L.C. (eds.), Pergamon, Oxford, 1992
18. SAKAI, A., TASUMI, T.: Appl. Phys. Lett. 64 (1994) 52
19. SAKAMOTO, T., FUNABASHI, H., OHTA, K., NAKAGAWA, T., KAWAI, N.J., KOJIMA, T., BANDO, Y.: Superlattices and Microstructures, 1 (1985) 347
20. SAKAMOTO, K., SAKAMOTO, T., NAGAO, S., HASHIGUCHI, G., KUNIYOSHI, K., BANDO, Y.: Jpn. J. Appl. Phys. 26 (1987) 666
21. SOREF, R.A.: J. Vac. Sci. Technol. A 14 (1996) 913
22. USAMI, N., FUKATSU, S., SHIRAKI, Y.: Appl. Phys. Lett. 63 (1993) 388
23. WANG, K.I., THOMAS, S.G., TANNER, M.O.: J. Mater. Sci.: Materials in Electronics 6 (1995) 311
24. WHAEL, T.E., PARKER, E.H.C.: J. Mater. Sci.: Materials in Electronics 6 (1995) 249