Thermal fatigue modeling of micromachined gas sensors

Sensors and Actuators, B: Chemical

Volumn 95, Issue 1-3, 2003, Pages 275-281

  Puigcorbe J ^a   Vila A ^a   Morante, J R ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

FEM modeling; Reliability; Thermal fatigue

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELASTOPLASTICITY; FATIGUE OF MATERIALS; FINITE ELEMENT METHOD; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; STRAIN MEASUREMENT; THERMOANALYSIS; THIN FILMS;

THERMAL FATIGUE;

CHEMICAL SENSORS;

EID: 0043236324     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00538-0     Document Type: Conference Paper

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