Fundamental problems of imaging subsurface structures in the backscattered electron mode in scanning electron microscopy

Scanning

Volumn 23, Issue 4, 2001, Pages 235-240

  Rau, E I ^a   Reimer, L ^b  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

Backscattered electron imaging; Backscattered electron microtomography; Contrast; In depth visualization; Information depth; Resolution

Indexed keywords

BACKSCATTERING; ELECTRON SCATTERING; SCANNING ELECTRON MICROSCOPY; SPECTROMETERS; TOMOGRAPHY; UNDERGROUND STRUCTURES;

BACKSCATTERED ELECTRONS (BSE);

IMAGING TECHNIQUES;

ARTICLE; CONTRAST; ELECTRON; ELECTRON MICROSCOPY; ENERGY; IMAGE ANALYSIS; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY;

EID: 0034874525     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950230403     Document Type: Article

References (14)

1. Visualization of subsurface structures in cells and tissues by backscattered electron imaging
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3. Simple theory concerning the reflection of electrons from solids
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5. Electron backscattering from solids and double layers
6. Penetration and energy-loss theory of electrons in solid targets
7. Information depth and spatial resolution in BSE microtomography in SEM
8. An annular toroidal backscattered electron energy analyzer for use in scanning electron microscopy
9. Energy-filtered imaging and spectroscopy of multilayered structures by backscattered electrons in SEM
10. Calculation of energy spectra from layered structures for backscattered electron spectrometry
11. Quantitative A.E.S. XPS
12. Determination of the "information depth" in the SEM
13. Effects of collector take-off angle and energy filtering on the BSE image in SEM