Development of parallel dip pen nanolithography probe arrays for high throughput nanolithography

Materials Research Society Symposium - Proceedings

Volumn 758, Issue , 2003, Pages 141-150

  Bullen, David A ^a   Wang, Xuefeng ^a   Zou, Jun ^a   Chung, Sung Wook ^b   Liu, Chang ^a   Mirkin, Chad A ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; BIOLOGICAL MATERIALS; COMPUTER SIMULATION; DEPOSITION; LITHOGRAPHY; MULTILAYERS; OPTIMIZATION; PROBES;

HIGH THROUGHPUT NANOLITHOGRAPHY; MULTILAYER THERMAL ACTUATORS; PARALLEL DIP PEN NANOLITHOGRAPHY;

NANOTECHNOLOGY;

EID: 0042967339     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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