Mechanical property measurement of thin-film gold using thermally actuated bimetallic cantilever beams

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 410-413

  Pamula, Vamsee K ^a   Jog, Anand ^a   Fair, Richard B ^a  

^a Duke University   (United States)

Author keywords

Finite element methods; Gold; Poisson's ratio; Thin film; Young's modulus

Indexed keywords

ACTUATORS; CANTILEVER BEAMS; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; DEPOSITION; ELASTIC MODULI; FINITE ELEMENT METHOD; GOLD; MICROELECTROMECHANICAL DEVICES; POISSON RATIO; POSITION MEASUREMENT;

MICROCANTILEVER BEAMS; MUMPS; THERMAL ACTUATION;

THIN FILMS;

EID: 6344220267     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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