Synthesis and characterization of cubic boron nitride films - Investigations of growth and annealing processes

Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 1272-1275

  Sell, K ^a   Holleck, H ^a   Leiste, H ^a   Stuber M ^a   Ulrich, S ^a   Ye, J ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Annealing; Cubic boron nitride; Sputtering; Stress

Indexed keywords

ADHESION; ANNEALING; COMPRESSIVE STRESS; CUBIC BORON NITRIDE; NUCLEATION; STRESS RELAXATION; SYNTHESIS (CHEMICAL);

ION IMPACT;

THIN FILMS;

ANNEALING; BORON NITRIDE; COATING; CUTTING TOOL; FILM; SPUTTERING; STRESS; WEAR RESISTANCE;

EID: 0036508219     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00738-5     Document Type: Article

References (24)